Abstract: According to one embodiment, a method includes acquiring information about a two-dimensional distribution of secondary electron intensity for a measurement target pattern, extracting, by a first method, an edge position of an edge for correction value acquisition, extracting, by a second method, an edge position of the edge for correction value acquisition, acquiring a difference between the edge positions extracted by the first and second methods, as a correction value, extracting, by the second method, an edge position of a desired edge based on the information about the two-dimensional distribution, and correcting the edge position of the desired edge based on the correction value.

Abstract: Disclosed is a pressure-sensitive adhesive tape or sheet having an adhesive face which includes two or more different pressure-sensitive adhesives each capable of acting on an adherend and exhibits adhesiveness and debonding capability both at high levels. The pressure-sensitive adhesive tape or sheet has an adhesive face being substantially smooth and including at least on region composed of a first pressure-sensitive adhesive and at least one region composed of a pressure-sensitive adhesive other than the first pressure-sensitive adhesive. In the pressure-sensitive adhesive tape or sheet, the region composed of the first pressure-sensitive adhesive and the region composed of the other pressure-sensitive adhesive than the first pressure-sensitive adhesive preferably are preferably in the form of stripes extending in the longitudinal direction.

Abstract: Provided is a heat-expandable removable acrylic pressure-sensitive adhesive tape that has high normal-state adhesive power when bonded independently of whether the adherend has or does not have irregular surface and permits easy separation when the bonded region is separated and disassembled by lowering the adhesive power by heating, that permits easily separation-decomposition, even after long-term storage at high temperature. The heat-expandable removable acrylic pressure-sensitive adhesive tape or sheet according to the present invention is a heat-expandable removable acrylic pressure-sensitive adhesive tape or sheet having a heat expanding agent-containing pressure-sensitive adhesive layer on or above at least one face of a bubble-bearing microparticle-containing viscoelastic material, characterized in that the heat expanding agent contains a heat-expandable microsphere having a shell-substance glass transition temperature of 92° C. or higher.

Abstract: Provided is a heat-expandable removable acrylic pressure-sensitive adhesive tape that has high normal-state adhesive power when bonded independently of whether the adherend has or does not have irregular surface and permits easy separation when the bonded region is separated and disassembled by lowering the adhesive power by heating, that permits easily separation-decomposition, even after long-term storage at high temperature. The heat-expandable removable acrylic pressure-sensitive adhesive tape or sheet according to the present invention includes at least a heat expanding agent-containing pressure-sensitive adhesive layer, and the tape or sheet has an initial 90° peel adhesive strength to a polycarbonate plate as adherend of 10 N/25 mm or more and a 90° peel adhesive strength after storage in an atmosphere at 80° C. for 2 months as bonded to the polycarbonate adherend and after heat expansion treatment of less than 10 N/25 mm.

Abstract: An object of the present invention is to provide a heat-expandable/peelable acrylic pressure-sensitive adhesive tape that maintains a high adhesion force, and can be easily separated or debonded at the bonded part by heating, regardless of the material constituting the adherend. Disclosed is a heat-expandable/peelable acrylic pressure-sensitive adhesive tape or sheet which includes at least a pressure-sensitive adhesive layer containing a blowing agent, a peelable or peel-assisting film layer, and a viscoelastic substrate containing microparticles, in which at least the peelable or peel-assisting film layer and the microparticle-containing viscoelastic substrate constitute a multilayer structure, and the multilayer structure is arranged on or above at least one side of the pressure-sensitive adhesive layer so that the blowing agent-containing pressure-sensitive adhesive layer is in contact with the peelable or peel-assisting film layer with or without the interposition of another layer.

Abstract: A pressure-sensitive adhesive composition or an acrylic pressure-sensitive adhesive tape in which peeling-off property or tearing-off property occurring by heating is improved while the high adhesiveness to a metallic material is being maintained, will be provided. The pressure-sensitive adhesive composition contains: an acrylic polymer (A); a (meth)acrylic polymer (B) whose mass average molecular weight (Mw) is such that 1000?Mw<30000; and a heat-expandable microsphere (C).

Abstract: A pressure-sensitive adhesive tape is provided with a pressure-sensitive adhesive layer and a water-repellent layer formed on the pressure-sensitive adhesive surface of the pressure-sensitive adhesive layer. The water-repellent layer is formed by using a water repellent exhibiting the water repellency in which a contact angle with water is greater than or equal to 140°. The water-repellent layer may have hydrophobic fine particles. The hydrophobic fine particle may contain a hydrophobic fine silica compound. The hydrophobic fine silica compound may be modified with hexamethyldisilazane.

Abstract: According to an aspect of the invention, there is provided a method comprising detecting a defect of a pattern formed on the photo mask, acquiring a pattern image of a first region on the photo mask, extracting a pattern contour from the pattern image to acquire pattern contour extracted data, producing first graphic data based on the pattern contour extracted data and a pixel size, acquiring pattern data including the first region and corresponding to a second region from design data, producing second graphic data from the pattern data, replacing the second graphic data with the first graphic data to produce third graphic data only in a region where the first graphic data is superimposed upon the second graphic data, producing transfer patterns of pattern shapes represented by the second and third graphic data, and comparing the transfer patterns to judge whether or not the defect needs to be corrected.

Abstract: A processing apparatus, which contains a processor that executes a program includes a series of instructions, includes a log recording unit configured to record an operation log of the processing apparatus; a managing unit configured to control a recording operation performed by the log recording unit and read the operation log recorded in the log recording unit; an input unit configured to detect, from among the series of instructions of the executed program; a start instruction that starts a process for delivering a control instruction destined for the managing unit to the managing unit and deliver the control instruction to the managing unit in response to the start instruction; and an output unit configured to receive the operation log read by the managing unit.

Abstract: Disclosed is a heat-expandable/peelable acrylic pressure-sensitive adhesive tape or sheet which maintains a high adhesion force but the bonded part can be easily separated/debonded regardless of whether the surface of the adherend is uneven. The heat-expandable/peelable acrylic pressure-sensitive adhesive tape or sheet includes a viscoelastic body containing both bubbles and microparticles, and on at least one side thereof, a pressure-sensitive adhesive layer containing a blowing agent. The heat-expandable/peelable acrylic pressure-sensitive adhesive tape or sheet preferably contains bubbles in an amount of 3 to 30 percent by volume based on the total volume of the viscoelastic body.

Abstract: The present invention relates to a disassemblable structure including: a double-coated pressure-sensitive adhesive tape or a double-coated pressure sensitive adhesive sheet including a substrate and pressure-sensitive adhesive layers formed on both surfaces of the substrate, at least one of the pressure-sensitive adhesive layers being a thermal foaming agent-containing pressure-sensitive adhesive layer; a heating element which foams the thermal foaming agent-containing pressure-sensitive adhesive layer by heating; and a pair of adherends joined to each other through the pressure-sensitive adhesive tape or sheet and the heating element.

Abstract: A pattern evaluation method for evaluating a mask pattern includes generating desired wafer pattern data corresponding to the evaluation position of a mask pattern, generating mask pattern contour data based on an image of the mask pattern, and performing a lithography/simulation process based on the mask pattern contour data and generating predicted wafer pattern data when the mask pattern is transferred to a wafer. Further, it includes deriving positional offset between the mask pattern contour data and mask pattern data, correcting a positional error between the desired wafer pattern data and the predicted wafer pattern data based on the positional offset, and comparing the desired wafer pattern data with the predicted wafer pattern data with the positional error corrected.

Abstract: According to an aspect of the invention, there is provided a method comprising detecting a defect of a pattern formed on the photo mask, acquiring a pattern image of a first region on the photo mask, extracting a pattern contour from the pattern image to acquire pattern contour extracted data, producing first graphic data based on the pattern contour extracted data and a pixel size, acquiring pattern data including the first region and corresponding to a second region from design data, producing second graphic data from the pattern data, replacing the second graphic data with the first graphic data to produce third graphic data only in a region where the first graphic data is superimposed upon the second graphic data, producing transfer patterns of pattern shapes represented by the second and third graphic data, and comparing the transfer patterns to judge whether or not the defect needs to be corrected.

Abstract: The object of the invention is to provide a pressure-sensitive adhesive sheet for identification, which is obtained by easy thick film coating in formation of a pressure-sensitive adhesive agent layer; which can be used even if the surface of a collection subject is wet with moisture; which is obtained without using an organic solvent in production steps; and which causes few damages on the surface of the collection subject, and a production method thereof.

Abstract: According to an aspect of the invention, there is provided a method comprising detecting a defect of a pattern formed on the photo mask, acquiring a pattern image of a first region on the photo mask, extracting a pattern contour from the pattern image to acquire pattern contour extracted data, producing first graphic data based on the pattern contour extracted data and a pixel size, acquiring pattern data including the first region and corresponding to a second region from design data, producing second graphic data from the pattern data, replacing the second graphic data with the first graphic data to produce third graphic data only in a region where the first graphic data is superimposed upon the second graphic data, producing transfer patterns of pattern shapes represented by the second and third graphic data, and comparing the transfer patterns to judge whether or not the defect needs to be corrected.

Abstract: A pattern evaluation method for evaluating a mask pattern includes generating desired wafer pattern data corresponding to the evaluation position of a mask pattern, generating mask pattern contour data based on an image of the mask pattern, and performing a lithography/simulation process based on the mask pattern contour data and generating predicted wafer pattern data when the mask pattern is transferred to a wafer. Further, it includes deriving positional offset between the mask pattern contour data and mask pattern data, correcting a positional error between the desired wafer pattern data and the predicted wafer pattern data based on the positional offset, and comparing the desired wafer pattern data with the predicted wafer pattern data with the positional error corrected.

Abstract: An image data correction method includes preparing correction data for correcting a distortion of an image obtained by an image acquiring section, acquiring outline data of a desired pattern obtained by the image acquiring section, and correcting the outline data of the desired pattern using the correction data.

Abstract: According to the present invention, of the both surfaces of a cleaning sheet, a contact face to be rubbed against a cleaning object is a concave convex plane containing a convex part 1 and a concave part 2. By rubbing this concave convex plane against a cleaning object, a removal target (e.g., paste accumulated on the back of screen printing plate) attached to a cleaning object can be effectively removed.

Abstract: In a semiconductor bare chip (57) on the front surface whereof is formed an integrated circuit, a magnetic loss film 55 is formed on the back surface of that semiconductor bare chip.

Abstract: An image data correction method includes preparing correction data for correcting a distortion of an image obtained by an image acquiring section, acquiring outline data of a desired pattern obtained by the image acquiring section, and correcting the outline data of the desired pattern using the correction data.