Patents by Inventor Ekaterina Rechav

Ekaterina Rechav has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for monitoring chamber cleanliness
    Patent number: 8361814
    Abstract: A method for evaluating a cleanliness of a tool, the method includes: receiving a wafer; cleaning the wafer; placing the wafer into the tool for a predefined period; removing the wafer from the tool, performing a contact angle measurement and determining the cleanliness of the wafer.
    Type: Grant
    Filed: February 9, 2006
    Date of Patent: January 29, 2013
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Dror Shemesh, Michal Eilon, Hen Doozli, Ekaterina Rechav, Eitan Binyamini
  • Method for monitoring chamber cleanliness
    Publication number: 20060216839
    Abstract: A method for evaluating a cleanliness of a tool, the method includes: receiving a wafer; cleaning the wafer; placing the wafer into the tool for a predefined period; removing the wafer from the tool, performing a contact angle measurement and determining the cleanliness of the wafer.
    Type: Application
    Filed: February 9, 2006
    Publication date: September 28, 2006
    Inventors: Dror Shemesh, Michal Eilon, Hen Doozli, Ekaterina Rechav, Eitan Binyamini