Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Abstract: A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).

Abstract: A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).