Patents by Inventor ELIZABETH COSTNER STEWART

ELIZABETH COSTNER STEWART has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120367
    Abstract: An electronic device includes a first dielectric layer above a semiconductor layer, lower-bandgap dielectric layer above the first dielectric layer, the lower-bandgap dielectric layer having a bandgap energy less than a bandgap energy of the first dielectric layer, a first capacitor plate above the lower-bandgap dielectric layer in a first plane of first and second directions, a second dielectric layer above the first capacitor plate, a second capacitor plate above the second dielectric layer in a second plane of the first and second directions, the first and second capacitor plates spaced apart from one another along a third direction, and a conductive third capacitor plate above the second dielectric layer in the second plane, the third capacitor plate spaced apart from the second capacitor plate in the second plane.
    Type: Application
    Filed: December 20, 2023
    Publication date: April 11, 2024
    Inventors: Elizabeth Costner Stewart, Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams
  • Publication number: 20240112953
    Abstract: A microelectronic device including a galvanic isolator with filler metal within an upper isolation element. The galvanic isolator includes a lower isolation element, an upper isolation element, and an inorganic dielectric plateau between the lower isolation element and the upper isolation element. The upper isolation element contains tines of filler metal which are electrically tied to each other and are electrically tied to the upper isolation element. The ends of the tines are rounded to minimize electric fields. The filler metal increases the overall metal density on the metal layer of the upper isolation element to meet the typical metal density requirements of modern microelectronic fabrication processing.
    Type: Application
    Filed: December 29, 2022
    Publication date: April 4, 2024
    Inventors: Jeffrey Alan West, Elizabeth Costner Stewart, Thomas Dyer Bonifield, Byron Lovell Williams, Kashyap Barot, Viresh Chinchansure, Sreeram N S
  • Publication number: 20240113094
    Abstract: A microelectronic device includes a galvanic isolation device on a silicon substrate and a semiconductor device on a semiconductor substrate. The galvanic isolation device includes a lower isolation element over the silicon substrate and an upper isolation element above the lower isolation element, separated by a dielectric plateau that comprises inorganic dielectric material extending from the lower isolation element to the upper isolation element. The galvanic isolation device includes lower bond pads connected to the lower isolation element adjacent to the dielectric plateau, and upper bond pads over the dielectric plateau, connected to the upper isolation element. The semiconductor device includes an active component, and device bond pads coupled to the active component. The microelectronic device includes first electrical connections to the lower bond pads and second electrical connections to the upper bond pads.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Inventors: Jeffrey Alan West, Sreeram N. S., Kashyap Barot, Thomas Dyer Bonifield, Byron Lovell Williams, Elizabeth Costner Stewart
  • Patent number: 11901402
    Abstract: An electronic device includes a first dielectric layer above a semiconductor layer, lower-bandgap dielectric layer above the first dielectric layer, the lower-bandgap dielectric layer having a bandgap energy less than a bandgap energy of the first dielectric layer, a first capacitor plate above the lower-bandgap dielectric layer in a first plane of first and second directions, a second dielectric layer above the first capacitor plate, a second capacitor plate above the second dielectric layer in a second plane of the first and second directions, the first and second capacitor plates spaced apart from one another along a third direction, and a conductive third capacitor plate above the second dielectric layer in the second plane, the third capacitor plate spaced apart from the second capacitor plate in the second plane.
    Type: Grant
    Filed: November 18, 2021
    Date of Patent: February 13, 2024
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Elizabeth Costner Stewart, Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams
  • Publication number: 20230420489
    Abstract: A galvanic isolation capacitor device includes a semiconductor substrate and a PMD layer over the semiconductor substrate. The PMD layer has a first thickness. A lower metal plate is over the PMD layer and an ILD layer is on the lower metal plate; the ILD layer has a second thickness. A ratio of the first thickness to the second thickness is between about 1 and 1.55 inclusive. A first upper metal plate over the ILD layer has a first area and a second upper metal plate over the ILD layer has a second area; a ratio of the first area to the second area is greater than about 5. The galvanic isolation capacitor device can be part of a multi-chip module.
    Type: Application
    Filed: September 6, 2023
    Publication date: December 28, 2023
    Inventors: Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams, Elizabeth Costner Stewart
  • Patent number: 11798979
    Abstract: An integrated capacitor on a semiconductor surface on a substrate includes a capacitor dielectric layer including at least one silicon compound material layer on a bottom plate. The capacitor dielectric layer includes a pitted sloped dielectric sidewall. Each of the pits is at least partially filled by one of a plurality of noncontiguous dielectric portions. A conformal dielectric layer may be formed over the noncontiguous dielectric portions. A top metal layer provides a top plate of the capacitor.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: October 24, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Elizabeth Costner Stewart, Jeffrey A. West, Thomas D. Bonifield, Joseph Andre Gallegos, Jay Sung Chun, Zhiyi Yu
  • Patent number: 11784212
    Abstract: A galvanic isolation capacitor device includes a semiconductor substrate and a PMD layer over the semiconductor substrate. The PMD layer has a first thickness. A lower metal plate is over the PMD layer and an ILD layer is on the lower metal plate; the ILD layer has a second thickness. A ratio of the first thickness to the second thickness is between about 1 and 1.55 inclusive. A first upper metal plate over the ILD layer has a first area and a second upper metal plate over the ILD layer has a second area; a ratio of the first area to the second area is greater than about 5. The galvanic isolation capacitor device can be part of a multi-chip module.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: October 10, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams, Elizabeth Costner Stewart
  • Publication number: 20230282595
    Abstract: An integrated circuit (IC) fabrication flow including a multilevel metallization scheme wherein one or more metal layer members of a scribelane structure are formed according to one or more design constraints. A total thickness of the metal layer members of the scribelane structure along a dicing path may be limited to a threshold value to optimize dicing separation yields in a dicing operation.
    Type: Application
    Filed: June 6, 2022
    Publication date: September 7, 2023
    Inventors: Jeffrey Alan West, Elizabeth Costner Stewart
  • Publication number: 20230197634
    Abstract: An integrated circuit with a first conductive region, a second conductive region, a plurality of dielectric layers of a first material type between the first conductive region and the second conductive region, and at least one dielectric layer of a second material type, between a first dielectric layer in the plurality of dielectric layers of a first material type and a second dielectric layer in the plurality of dielectric layers of the first material type. Each dielectric layer of a first material type has a thickness in a range from 0.5 ?m to 5.0 ?m, and the at least one dielectric layer of a second material type is not contacting a metal and has a thickness less than 2.0 ?m, and the second material type differs from the first material type in at least one of compression stress or elements in the first material type as compared to elements in the second material type.
    Type: Application
    Filed: December 21, 2021
    Publication date: June 22, 2023
    Inventors: Elizabeth Costner Stewart, Jeffrey Alan West, Thomas Dyer Bonifield
  • Publication number: 20230154974
    Abstract: An electronic device includes a first dielectric layer above a semiconductor layer, lower-bandgap dielectric layer above the first dielectric layer, the lower-bandgap dielectric layer having a bandgap energy less than a bandgap energy of the first dielectric layer, a first capacitor plate above the lower-bandgap dielectric layer in a first plane of first and second directions, a second dielectric layer above the first capacitor plate, a second capacitor plate above the second dielectric layer in a second plane of the first and second directions, the first and second capacitor plates spaced apart from one another along a third direction, and a conductive third capacitor plate above the second dielectric layer in the second plane, the third capacitor plate spaced apart from the second capacitor plate in the second plane.
    Type: Application
    Filed: November 18, 2021
    Publication date: May 18, 2023
    Inventors: Elizabeth Costner Stewart, Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams
  • Publication number: 20230056046
    Abstract: An electronic device has a conductive shield between first and second regions in a multilevel metallization structure, as well as a capacitor with first and second terminals in the first region, the first terminal laterally overlaps the second terminal by an overlap distance of 1.0 ?m to 6.0 ?m, the conductive shield includes a first metal line that encircles the first terminal, and the first metal line is spaced apart from the first terminal by a gap distance of 0.5 ?m to 1.0 ?m.
    Type: Application
    Filed: February 28, 2022
    Publication date: February 23, 2023
    Inventors: Byron Lovell Williams, Elizabeth Costner Stewart, Jeffrey Alan West, Thomas Dyer Bonifield
  • Patent number: 11532693
    Abstract: Described examples include a hybrid circuit having a component. The component has a first conductive element on a substrate having a configuration and having a first periphery and having an extension at the first periphery. The component also has a dielectric on the first conductive element. The component also has a second conductive element having the configuration on the dielectric that is proximate to and aligned with the first conductive element, and has a second periphery, the extension of the first conductive element extending past the second periphery.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: December 20, 2022
    Assignee: Texas Instruments Incorporated
    Inventors: Jeffrey Alan West, Byron Lovell Williams, Elizabeth Costner Stewart, Thomas Dyer Bonifeld
  • Patent number: 11495658
    Abstract: An electronic device, e.g. integrated circuit, has top and bottom metal plates located over a substrate, the bottom plate located between the top plate and the substrate. A high-stress silicon dioxide layer is located between the bottom plate and the substrate. At least one low-stress silicon dioxide layer is located between the top plate and the bottom plate.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: November 8, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Elizabeth Costner Stewart, Jeffrey A. West, Thomas D. Bonifield
  • Publication number: 20220231115
    Abstract: Described examples include a hybrid circuit having a component. The component has a first conductive element on a substrate having a configuration and having a first periphery and having an extension at the first periphery. The component also has a dielectric on the first conductive element. The component also has a second conductive element having the configuration on the dielectric that is proximate to and aligned with the first conductive element, and has a second periphery, the extension of the first conductive element extending past the second periphery.
    Type: Application
    Filed: January 19, 2021
    Publication date: July 21, 2022
    Inventors: Jeffrey Alan West, Byron Lovell Williams, Elizabeth Costner Stewart, Thomas Dyer Bonifeld
  • Publication number: 20220069066
    Abstract: A galvanic isolation capacitor device includes a semiconductor substrate and a PMD layer over the semiconductor substrate. The PMD layer has a first thickness. A lower metal plate is over the PMD layer and an ILD layer is on the lower metal plate; the ILD layer has a second thickness. A ratio of the first thickness to the second thickness is between about 1 and 1.55 inclusive. A first upper metal plate over the ILD layer has a first area and a second upper metal plate over the ILD layer has a second area; a ratio of the first area to the second area is greater than about 5. The galvanic isolation capacitor device can be part of a multi-chip module.
    Type: Application
    Filed: August 31, 2020
    Publication date: March 3, 2022
    Inventors: Thomas Dyer Bonifield, Jeffrey Alan West, Byron Lovell Williams, Elizabeth Costner Stewart
  • Publication number: 20210367044
    Abstract: An integrated circuit (IC) includes a field-plated transistor including a substrate having a semiconductor surface layer, at least one body region in the semiconductor surface layer, and at least a first trench isolation region adjacent to the body region having at least a first tapered sidewall that has an average angle along its full length of 15 to 70 degrees. A gate is over the body region. A field plate is over the first tapered trench isolation region. A source is on one side of the field plate and a drain is on an opposite side of the field plate. The IC also includes circuitry for realizing at least one circuit function having a plurality of transistors which are configured together with the field-plated transistor that utilize second trench isolation regions for isolation that have an average angle of 75 and 90 degrees.
    Type: Application
    Filed: August 10, 2021
    Publication date: November 25, 2021
    Inventors: MING-YEH CHUANG, ELIZABETH COSTNER STEWART
  • Patent number: 11121224
    Abstract: An integrated circuit (IC) includes a field-plated transistor including a substrate having a semiconductor surface layer, at least one body region in the semiconductor surface layer, and at least a first trench isolation region adjacent to the body region having at least a first tapered sidewall that has an average angle along its full length of 15 to 70 degrees. A gate is over the body region. A field plate is over the first tapered trench isolation region. A source is on one side of the field plate and a drain is on an opposite side of the field plate. The IC also includes circuitry for realizing at least one circuit function having a plurality of transistors which are configured together with the field-plated transistor that utilize second trench isolation regions for isolation that have an average angle of 75 and 90 degrees.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: September 14, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Ming-Yeh Chuang, Elizabeth Costner Stewart
  • Publication number: 20210280533
    Abstract: An integrated circuit (IC) includes a substrate having functional circuitry for realizing at least one circuit function configured together with at least one high voltage isolation component including a top metal feature above the substrate. A crack suppressing dielectric structure including at least a crack resistant dielectric layer is on at least a top of the top metal feature. At least one dielectric passivation overcoat (PO) layer is on an outer portion of the top metal feature.
    Type: Application
    Filed: May 25, 2021
    Publication date: September 9, 2021
    Inventors: ELIZABETH COSTNER STEWART, JEFFREY A. WEST
  • Patent number: 11049820
    Abstract: An integrated circuit (IC) includes a substrate having functional circuitry for realizing at least one circuit function configured together with at least one high voltage isolation component including a top metal feature above the substrate. A crack suppressing dielectric structure including at least a crack resistant dielectric layer is on at least a top of the top metal feature. At least one dielectric passivation overcoat (PO) layer is on an outer portion of the top metal feature.
    Type: Grant
    Filed: July 30, 2018
    Date of Patent: June 29, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Elizabeth Costner Stewart, Jeffrey A. West
  • Publication number: 20210143249
    Abstract: An integrated capacitor on a semiconductor surface on a substrate includes a capacitor dielectric layer including at least one silicon compound material layer on a bottom plate. The capacitor dielectric layer includes a pitted sloped dielectric sidewall. Each of the pits is at least partially filled by one of a plurality of noncontiguous dielectric portions. A conformal dielectric layer may be formed over the noncontiguous dielectric portions. A top metal layer provides a top plate of the capacitor.
    Type: Application
    Filed: January 25, 2021
    Publication date: May 13, 2021
    Inventors: ELIZABETH COSTNER STEWART, JEFFREY A. WEST, THOMAS D. BONIFIELD, JOSEPH ANDRE GALLEGOS, JAY SUNG CHUN, ZHIYI YU