Patents by Inventor Ellis Gray Bohon, III

Ellis Gray Bohon, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibrating wafer particle cleaner
    Patent number: 6565669
    Abstract: A vibrating wafer particle cleaner for cleaning a semiconductor wafer. The cleaner removes particles from the surfaces of the wafer by vibrating the wafer inside an enclosure and passing a filtered air stream at the wafer to flush the particles out of the enclosure.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: May 20, 2003
    Assignee: Intel Corporation
    Inventor: Ellis Gray Bohon, III