Patents by Inventor Erez Admoni
Erez Admoni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10837540Abstract: A method and a lubrication system for lubricating a transmission system component. The lubrication system may include a lubrication system reservoir for storing a lubrication liquid; and a distribution system. The distribution system may be configured to refill, with the lubrication liquid, a transmission system reservoir that is configured to lubricate the transmission system component. The refill occurs while the transmission system component and the lubrication system are positioned within a vacuum chamber.Type: GrantFiled: September 19, 2017Date of Patent: November 17, 2020Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Erez Admoni, Efim Vinnitsky
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Publication number: 20190085968Abstract: A method and a lubrication system for lubricating a transmission system component. The lubrication system may include a lubrication system reservoir for storing a lubrication liquid; and a distribution system. The distribution system may be configured to refill, with the lubrication liquid, a transmission system reservoir that is configured to lubricate the transmission system component. The refill occurs while the transmission system component and the lubrication system are positioned within a vacuum chamber.Type: ApplicationFiled: September 19, 2017Publication date: March 21, 2019Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Erez Admoni, Efim Vinnitsky
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Patent number: 10056274Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.Type: GrantFiled: February 10, 2016Date of Patent: August 21, 2018Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Michael R. Rice, Paul Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni
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Patent number: 9997328Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisioType: GrantFiled: May 20, 2016Date of Patent: June 12, 2018Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
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Patent number: 9587749Abstract: There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.Type: GrantFiled: August 11, 2014Date of Patent: March 7, 2017Assignee: Applied Materials Israel, Ltd.Inventors: Michael R. Rice, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni, Paul Reuter, William (Ty) Weaver
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Patent number: 9488924Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.Type: GrantFiled: January 7, 2014Date of Patent: November 8, 2016Assignee: Applied Materials Israel Ltd.Inventors: Mariano Abramson, Hadar Mazaki, Erez Admoni, Israel Avneri
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Publication number: 20160268097Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisioType: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
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Publication number: 20160163570Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.Type: ApplicationFiled: February 10, 2016Publication date: June 9, 2016Inventors: Michael R. Rice, Paul Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni
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Publication number: 20150192868Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.Type: ApplicationFiled: January 7, 2014Publication date: July 9, 2015Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Mariano Abramson, Hadar Mazaki, Erez Admoni, Israel Avneri
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Publication number: 20150075659Abstract: According to an embodiment of the invention, there is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.Type: ApplicationFiled: August 11, 2014Publication date: March 19, 2015Inventors: Michael R. Rice, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni, Paul Reuter, William (Ty) Weaver
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Patent number: 7339661Abstract: Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.Type: GrantFiled: September 8, 2003Date of Patent: March 4, 2008Inventors: Doron Korngut, Erez Admoni, Ofer Kadar, Lev Haikoviz, Haim Feldman, Avishay Guetta
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Publication number: 20050219518Abstract: Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.Type: ApplicationFiled: September 8, 2003Publication date: October 6, 2005Inventors: Doron Korngut, Erez Admoni, Ofer Kadar, Lev Haikoviz, Haim Feldman, Avishay Guetta