Patents by Inventor Eric A. Zadai

Eric A. Zadai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110153084
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: February 3, 2011
    Publication date: June 23, 2011
    Applicant: MEGA FLUID SYSTEMS, INC.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai
  • Patent number: 7905653
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: March 15, 2011
    Assignee: Mega Fluid Systems, Inc.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
  • Publication number: 20080062813
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: November 14, 2007
    Publication date: March 13, 2008
    Applicant: CELERITY, INC.
    Inventors: Jeffrey Wilmer, Daniel Mackenzie, John Lull, Eric Zadai, Michael Walker
  • Patent number: 6923568
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: August 2, 2005
    Assignee: Celerity, Inc.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
  • Publication number: 20040057334
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: September 17, 2003
    Publication date: March 25, 2004
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai
  • Publication number: 20020048213
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Application
    Filed: July 31, 2001
    Publication date: April 25, 2002
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker