Abstract: A connector for electrically connecting to pads formed on a semiconductor device includes a substrate and an array of contact elements of conductive material formed on the substrate. Each contact element includes a base portion attached to the top surface of the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate. The curved spring portion is formed to curve away from a plane of contact and has a curvature disposed to provide a controlled wiping action when engaging a respective pad of the semiconductor device.

Abstract: A die package is provided including a circuit board with a recess for a die mounting area. A cap receiving area is located in the circuit board at least partially around the recess for the die mounting area. A cap located in the cap receiving area includes resilient contacts corresponding to at least some contact pad locations on one of a die or a secondary circuit board affixed to die to establish contact between the resilient contacts on the cap and the contact pad locations. A die for use with the die package can include contact pads in the heretofore unused center area of the die, as well as the typical peripheral contact pads, allowing more IO connections, more efficient connections and greater contact pad areas.

Abstract: A system for batch forming a sheet of spring elements in three dimensions includes a top spacer layer. A plurality of ball bearings is arranged in a predetermined pattern on the top spacer layer. A spring element sheet containing the spring elements defined in two dimensions is positioned on the top spacer layer and the plurality of ball bearings. A top spacer layer is positioned on the spring element sheet. The top spacer layer and the bottom support layer are adapted to have a force applied thereto to push the plurality of ball bearings against the spring element sheet, such that the spring elements extend above the plane of the spring element sheet, thereby forming the spring elements in three dimensions.

Abstract: A connector for electrically connecting to pads formed on a semiconductor device includes a substrate and an array of contact elements of conductive material formed on the substrate. Each contact element includes a base portion attached to the top surface of the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate. The curved spring portion is formed to curve away from a plane of contact and has a curvature disposed to provide a controlled wiping action when engaging a respective pad of the semiconductor device.

Abstract: A method for forming a connector including an array of contact elements includes forming a support layer on a substrate, patterning the support layer to define an array of support elements, isotropically etching the support elements to form rounded corners on the top of each support element, forming and patterning a metal layer to define an array of contact elements where each contact element includes a first metal portion on the substrate and a second metal portion extending from the first metal portion and partially across the top of a respective support element, and removing the support elements. The contact elements thus formed each includes a base portion attached to the substrate and a curved spring portion extending from the base portion and having a distal end projecting above the substrate. The curved spring portion is formed to have a concave curvature with respect to the surface of the substrate.