Abstract: An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.

Abstract: Liquid phase material for a semiconductor fabrication process is simultaneously and continuously supplied to a plurality of processing tools from a liquid refill module rather than from a limited-capacity ampoule. A gas panel receives the flow of liquid material from the liquid refill module, and converts the liquid material into the gas phase. The gas panel includes a purge gas inlet and a waste outlet in communication with forelines of the semiconductor processing tools, such that vaporizer, flowmeter, and gas/liquid handling line components of the gas panel can periodically be effectively purged without contaminating other elements of the gas panel.

Abstract: Disclosed are a system and method for loading diagnostic routines for execution in a computer system. The method comprises the steps of (1) executing a boot loading routine stored in non-volatile memory within the computer system, the boot loading routine providing an environment in lieu of an operating system of the computer system within which to execute diagnostic routines, the boot loading routine including a decompression routine, (2) decompressing a compressed diagnostic routine stored in the non-volatile memory into video random access memory (RAM) and (3) executing the decompressed diagnostic routine under control of the boot loading routine. The present invention, in its preferred embodiment, allows relatively large diagnostic routines to be stored in electrically erasable programmable read only memory ("EEPROM") and decompressed, as required, into video RAM for execution, without requiring the computer's operating system to function.

Abstract: A watchdog timer circuit of the present invention monitors a computer system (S) during diagnostic testing and resets the system when it is nonfunctioning. A real-time clock (RTC) (21), programmed by a central processing unit (CPU) (29) to run for a period of time, produces a reset signal after the period of time elapses. Typically this time period relates to a diagnostic program being run. The reset signal serves as an input to reset circuitry (28) which immediately transmits a nonmaskable interrupt (NMI) to the CPU (29) and, after a delay period, transmits a hardware reset signal to the CPU (29). When functioning properly, the CPU (29) prepares for the hardware reset signal that is produced by the reset circuitry (28) and avoids being reset by the hardware reset signal. However, when the CPU (29) is not functioning properly, the hardware reset signal resets the CPU (29).

Abstract: A memory write disable circuit which disables write operations to main memory during cache diagnostics and thus provides a generic means for testing cache memory systems. Disabling write operations to main memory allows the diagnostics to easily distinguish between cache hits and cache misses during diagnostics. The disable circuit operates by disabling the output enable for the main memory write signal. This disables writes to main memory in a manner external to the memory controller and thus allows tags to be loaded from a cacheable space in main memory. This enables the testing of cache memory systems in computer systems using integrated cache and memory controllers which prevent read hits to memory addresses whose cacheability has been disabled. This also provides a testability function that is hardware independent and thus can be used regardless of the configuration or processor used in the computer system.

Abstract: Disclosed are a system and method for loading diagnostic routines images from disk for execution in a computer system. The method comprises the steps of (1) executing a boot loading routine stored in non-volatile memory within the computer system, the boot loading routine providing an environment in lieu of an operating system of the computer system within which to execute diagnostic routines, the boot loading routine including a disk access routine, (2) retrieving a diagnostic routine stored as an image on a disk into video random access memory ("RAM") with the disk access routine and (3) executing the retrieved diagnostic routine under control of the boot loading routine. The present invention, in its preferred embodiment, allows relatively large diagnostic routines to be stored in the form of images on a disk drive in the computer system and retrieved, as required, into video RAM for execution, without requiring the computer's operating system to function.

Abstract: Disclosed are a circuit and method for remote diagnosis of personal computers. The method comprises the steps of (1) confirming an existence and a proper operation of a modem coupled to the personal computer, the step of confirming performed in a central processing unit ("CPU") of the personal computer and in a diagnostic environment independent of a normal operating system of the personal computer, (2) receiving an indication of a selection of diagnostic routines to be performed from a remote location via the modem and (3) performing selected ones of the diagnostic routines as a function of the selection. The present invention allows an experienced technician located remotely from the computer to interact as though seated in front of it, to thereby allow remote diagnosis of even critical faults that prevent the computer from booting.