Patents by Inventor Eric Stegall

Eric Stegall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PROCESS CHAMBER AND LOAD-LOCK SPLIT FRAME CONSTRUCTION
    Publication number: 20080289284
    Abstract: The present invention generally relates to a split frame assembly for supporting a chamber in a processing system. In order to adequately fit into the body of an airplane for transport, the frame may be split into two pieces. Once split, each piece may individually be loaded onto the airplane. The upper piece may comprise all of the various components necessary to operate the chamber including gas panels, control panels, or other panels. The lower piece may support the upper piece.
    Type: Application
    Filed: February 29, 2008
    Publication date: November 27, 2008
    Inventors: SUHAIL ANWAR, Eric Stegall, Robin L. Tiner, Janusz Jozwiak, Philip Vancas