Patents by Inventor Eric T. Eisenbraun

Eric T. Eisenbraun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials
    Patent number: 5376409
    Abstract: A process and apparatus for the use of liquid-source bubbler/delivery systems for the delivery of solid source precursors employed in the growth of advanced technical materials such as the deposition of copper films in microelectronic devices.
    Type: Grant
    Filed: December 21, 1992
    Date of Patent: December 27, 1994
    Assignee: The Research Foundation of State University of New York
    Inventors: Alain E. Kaloyeros, Eric T. Eisenbraun, Bo Zheng