Abstract: A projection display includes at least one light source, at least one reflective image generator configured to represent frames in a two-dimensional distribution of subareas of same, a projection optics arrangement having a two-dimensional arrangement of optical projection elements and being configured to image an associated subarea of the at least one image generator onto an image plane in each case, so that images of the frames superimpose within the image plane to form an overall picture, and at least one beam splitter arranged within an optical path between the at least one reflective image generator and the two-dimensional arrangement of optical projection elements, on the one hand, and the optical path between the at least one light source and the at least one reflective image generator, on the other hand.

Abstract: A projection display having at least one light source and also regularly-disposed optical channels. The optical channels comprise at least one field lens, to which respectively one object structure to be imaged and also at least one projection lens are assigned. The distance of the projection lenses from the assigned object structures corresponds to the focal distance of the projection lenses while the distance of the object structures to be imaged from the assigned field lens is chosen such that a Köhler illumination of the assigned projection lens is made possible. Then the individual projections are superimposed to form the total image.

Abstract: A projection display includes at least one light source, at least one reflective image generator configured to represent frames in a two-dimensional distribution of subareas of same, a projection optics arrangement having a two-dimensional arrangement of optical projection elements and being configured to image an associated subarea of the at least one image generator onto an image plane in each case, so that images of the frames superimpose within the image plane to form an overall picture, and at least one beam splitter arranged within an optical path between the at least one reflective image generator and the two-dimensional arrangement of optical projection elements, on the one hand, and the optical path between the at least one light source and the at least one reflective image generator, on the other hand.

Abstract: The invention relates to a projection display having at least one light source and also regularly-disposed optical channels. The optical channels comprise at least one field lens, to which respectively one object structure to be imaged and also at least one projection lens are assigned. The distance of the projection lenses from the assigned object structures corresponds to the focal distance of the projection lenses whilst the distance of the object structures to be imaged from the assigned field lens is chosen such that a Köhler illumination of the assigned projection lens is made possible. Then the individual projections are superimposed to form the total image.

Abstract: Homogeneity residuals of the refractive index have a strong influence on the performance of lithography tools for both 193 and 157 nm application wavelengths. By systematic investigations of various defects in the real structure of CaF2 crystals, the origin of homogeneity residuals can be shown. Based on a quantitative analysis we define limiting values for the individual defects which can be either tolerated or controlled by optimized process steps, e.g. annealing. These correlations were carried out for all three relevant main crystal lattice orientations of CaF2 blanks. In conclusion we achieved a strong improvement of the critical parameters of both refractive index homogeneity and striae for large size lens blanks up to 270 mm diameter.

Abstract: Homogeneity residuals of the refractive index have a strong influence on the performance of lithography tools for both 193 and 157 nm application wavelengths. By systematic investigations of various defects in the real structure of CaF2 crystals, the origin of homogeneity residuals can be shown. Based on a quantitative analysis we define limiting values for the individual defects which can be either tolerated or controlled by optimized process steps, e.g. annealing. These correlations were carried out for all three relevant main crystal lattice orientations of CaF2 blanks. In conclusion we achieved a strong improvement of the critical parameters of both refractive index homogeneity and striae for large size lens blanks up to 270 mm diameter.