Patents by Inventor Erik Hjertaas

Erik Hjertaas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER STACK CLEANING
    Publication number: 20110168212
    Abstract: The invention comprises a device and method for surface cleaning of individual wafers or substrates arranged in a stack along a stacking direction, where a jet of fluid is sent towards the stack in a direction perpendicular to the stacking direction and it is provided a relative movement between the wafer stack and the nozzle in the stacking direction.
    Type: Application
    Filed: January 15, 2009
    Publication date: July 14, 2011
    Applicant: REC ScanWafer AS
    Inventors: Per Arne Wang, Arne Ramsland, Ole Christian Tronrud, Erik Hjertaas, Bent Hammel, André Skeie, Ola Tronrud
  • Method and device for separating silicon wafers
    Publication number: 20080146003
    Abstract: The invention relates to a method for separation of a silicon wafer (12a) from a vertical stack (10) of silicon wafers (12). The method is characterised in that it comprises attaching a movable transport device (2) to a surface of the silicon wafer (12a) in the stack (10), and horizontal movement of the silicon wafer (12a) parallel (A) to the surface of the silicon wafer (12a) until the silicon wafer (12a) is separated from the stack (10). The invention also comprises a device for implementing the method.
    Type: Application
    Filed: December 19, 2007
    Publication date: June 19, 2008
    Applicant: REC ScanWafer AS
    Inventors: Per Arne Wang, Arne Ramsland, Ole Christian Tronrud, Erik Hjertaas, Bent Hammel, Andre Skeie, Ola Tronrud