Patents by Inventor Erik Magnussen

Erik Magnussen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5727685
    Abstract: A cassette or box for containing and holding a planar substrate such as a reticle having a clamp bar coupled to corner supports by a spring or flexure and a linkage. A clamp bar is pivotally attached to bottom corner supports and a spring or flexure and linked to a top corner support, such that movement of the load bar causes the corner supports to pivot away from a reticle being held only at the corners. An elevation bar is also used to preposition the reticle in one direction. The present invention greatly facilitates the positioning and handling of a reticle as used in photolithography to manufacture semiconductor devices. Additionally, the present invention greatly reduces particulate contamination.
    Type: Grant
    Filed: July 24, 1996
    Date of Patent: March 17, 1998
    Assignee: SVG Lithography Systems, Inc.
    Inventors: Joseph Laganza, Hoon-Yeng Yap, Teodorico A. Cruz, Erik Magnussen, Craig S. Dunning