Patents by Inventor Erik Peter DE KORT

Erik Peter DE KORT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for controlling a manufacturing apparatus and associated apparatuses
    Patent number: 11860549
    Abstract: A method for determining a correction for control of at least one manufacturing apparatus used in a manufacturing process for providing structures to a region on a substrate, the region including a plurality of sub-regions. The method includes obtaining measurement data relating to a process parameter of the manufacturing process for the region; and determining a correction for the manufacturing apparatus based on the measurement data. The correction is configured to maintain the process parameter within a specified range across a boundary between two of the sub-regions and/or to better correct the process parameter across the boundary between two of the sub-regions with respect to within the remainder of the region.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: January 2, 2024
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Wolter Siemons, Daan Maurits Slotboom, Erik Peter De Kort
  • METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APPARATUSES
    Publication number: 20210247700
    Abstract: A method for determining a correction for control of at least one manufacturing apparatus used in a manufacturing process for providing structures to a region on a substrate, the region including a plurality of sub-regions. The method includes obtaining measurement data relating to a process parameter of the manufacturing process for the region; and determining a correction for the manufacturing apparatus based on the measurement data. The correction is configured to maintain the process parameter within a specified range across a boundary between two of the sub-regions and/or to better correct the process parameter across the boundary between two of the sub-regions with respect to within the remainder of the region.
    Type: Application
    Filed: May 1, 2019
    Publication date: August 12, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wolter SIEMONS, Daan Maurits SLOTBOOM, Erik Peter DE KORT