Abstract: A device that uses a UV sensing element capable of converting photons from a high temperature thermal source, to an electrical current. Such current is then compared with the theoretical current to be obtained from a source with the dimensions of the actual source. The theoretical current is obtained by integrating.

Abstract: Embodiments of the disclosure generally relate to an improved batch processing load lock chamber, a cluster tool having the same and a method of using the improved load lock chamber to clean a plurality of substrates disposed within. In one embodiment, a load lock chamber includes a chamber body, a cassette disposed in the chamber body, a remote plasma source, a plurality of inlet nozzles and a plurality of outlet ports. The chamber body has a plurality of substrate transfer slots formed therein. The cassette has a plurality of substrate storage slots and is configured to move up and down within the chamber body. The plurality of inlet nozzles is coupled to the remote plasma source and faces a processing region defined within the chamber body. The plurality of outlet ports faces the plurality of inlet nozzles across the processing region.

Abstract: Provided are apparatus and methods for generating a chemical precursor. The apparatus comprises an inlet line to be connected to an ampoule and an outlet line to be connected to an ampoule. The inlet line having an inlet valve to control the flow of a carrier gas into the ampoule and the outlet line has an outlet valve to control the flow exiting the ampoule. A bypass valve allows carrier gas to bypass the ampoule and purge the outlet valve without flowing gas into the ampoule.

Abstract: Described are systems and methods for the hydroxylation of a substrate surface using ammonia and water vapor.

Abstract: The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and correlated to performance of the injection valve.

Abstract: The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and correlated to performance of the injection valve.