Abstract: A rotary locking cylinder includes a housing and a rotor mounted therein. Furthermore, tumblers influencing the combinatorics each have a core pin, a housing pin, and a key channel incorporated into the rotor. The tumblers are arranged in the keyway by inserting the security key. The at least two tumblers are mechanically controlled by the security key so that they are arranged radially in different directions. At least one of the tumblers is pulled against the keyway by the security key for arrangement. Furthermore, the at least one tumbler is struck and arranged by a front key tip of the security key.

Abstract: The invention relates to a closing device which comprises a stationary part (2) and a pant (3) which is displacably mounted thereon. Tumblers (Z1-Z5) are arranged by means of a key (19) in order to release the displaceable part (3). Said tumblers (Z1-Z5) are maintained in a locking position by means of the locking element (14, 27, 33). The locking element (14, 27, 33) can be adjusted by means of a drive (13, 23, 30) in order to release the tumblers (Z1-Z5), which can be controlled via an electronic control device (16).

Abstract: The invention relates to a closing device which includes a stationary part and a part which is displaceably mounted thereon. Tumblers are arranged by means of a key in order to release the displaceable part. These tumblers are maintained in a locking position by means of the locking element. The locking element can be adjusted by means of a drive in order to release the tumblers, which can be controlled via an electronic control device.

Abstract: An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gases through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

Abstract: An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.

Abstract: The invention relates to a closing device which includes a stationary part and a part which is displaceably mounted thereon. Tumblers are arranged by means of a key in order to release the displaceable part. These tumblers are maintained in a locking position by means of the locking element. The locking element can be adjusted by means of a drive in order to release the tumblers, which can be controlled via an electronic control device.

Abstract: Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (2) A substantially vertical arrangement of one or more rifts in the suspension wall which facilitate horizontal buckling or flexing of the suspension wall. (3) A plurality of suspension walls whose respective central portions are coplanar. (4) A gas sealing skirt that helps protect the suspension wall from direct contact with process gas. The gas sealing skirt is connected to either the chamber wall or the showerhead but is not connected to both.

Abstract: Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) A gas sealing skirt that helps protect the suspension wall from direct contact with process gas. The gas sealing skirt is connected to either the chamber wall or the showerhead but is not connected to both. (2) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (3) A substantially vertical arrangement of one or more rifts in the suspension wall which facilitate horizontal buckling or flexing of the suspension wall. (4) A plurality of suspension walls whose respective central portions are coplanar.

Abstract: The invention relates to an electromechanical lock cylinder, comprising a first cylinder half (2), arranged on the outside of the door, with a key passage (8) for a security key (44) and a second cylinder half (3), arranged on the inside of the door, with a rotating knob rotor (4). Tumblers in the first cylinder half (2) are arranged for rotational release by a security key (44). An electronic device (17) is arranged in the rotating knob (24) for control of a locking device (43). The rotating knob (24) forms a unit with the electronic device (17) arranged therein, detachably mounted on an extension (4a) of the rotating knob rotor (4), projecting past the housing (6). The rotating knob rotor (24) may be adjusted for length by means of an exchangeable adapter (18a to 18c).

Abstract: A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Abstract: An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gases through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

Abstract: An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

Abstract: The invention relates to a closing device which comprises a stationary part (2) and a pant (3) which is displacably mounted thereon. Tumblers (Z1-Z5) are arranged by means of a key (19) in order to release the displaceable part (3). Said tumblers (Z1-Z5) are maintained in a locking position by means of the locking element (14, 27, 33). The locking element (14, 27, 33) can be adjusted by means of a drive (13, 23, 30) in order to release the tumblers (Z1-Z5), which can be controlled via an electronic control device (16).

Abstract: Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) A gas sealing skirt that helps protect the suspension wall from direct contact with process gas. The gas sealing skirt is connected to either the chamber wall or the showerhead but is not connected to both. (2) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (3) A substantially vertical arrangement of one or more rifts in the suspension wall which facilitate horizontal buckling or flexing of the suspension wall. (4) A plurality of suspension walls whose respective central portions are coplanar.

Abstract: Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (2) A substantially vertical arrangement of one or more rifts in the suspension wall which facilitate horizontal buckling or flexing of the suspension wall. (3) A plurality of suspension walls whose respective central portions are coplanar. (4) A gas sealing skirt that helps protect the suspension wall from direct contact with process gas. The gas sealing skirt is connected to either the chamber wall or the showerhead but is not connected to both.

Abstract: The invention relates to an electromechanical lock cylinder, comprising a first cylinder half (2), arranged on the outside of the door, with a key passage (8) for a security key (44) and a second cylinder half (3), arranged on the inside of the door, with a rotating knob rotor (4). Tumblers in the first cylinder half (2) are arranged for rotational release by a security key (44). An electronic device (17) is arranged in the rotating knob (24) for control of a locking device (43). The rotating knob (24) forms a unit with the electronic device (17) arranged therein, detachably mounted on an extension (4a) of the rotating knob rotor (4), projecting past the housing (6). The rotating knob rotor (24) may be adjusted for length by means of an exchangeable adapter (18a to 18c).

Abstract: The locking cylinder has a basic code which can be changed using at least one change key (17, 17?). A rotor (3) is mounted in a cylinder housing (2a, 2b) and has a keyway (4) into which a shank of a standard key which is provided with control surfaces 18 can be pushed in order to position the tumblers which are arranged in three first rows (A, B, C). Further tumblers have coding elements (13) which are arranged in further bores in the cylinder housing (2a, 2b) in a programming position of the rotor (3). The change key (17, 17?) interacts with three further rows (D, E, F) of tumblers in the programming position, these tumblers being arranged in slides. These further rows (D, E, F) each contain tumblers having coding elements (C). The locking cylinder can be produced with a smaller outside diameter and be installed in a particularly cost-effective manner.

Abstract: A dog training and control apparatus including an elongated walking wand having a distraction end and a handle end, and at least two leash receiving guide rings, a first of which is attached to the wand proximate the handle end, and a second of which is attached to the wand along a mid portion of the length thereof, whereby a leash can be strung through the guide rings, with one end of the leash being secured to the wand, and a distal end of the leash being attachable to the collar of a dog to be trained, such that a handler gripping the wand at the handle end can use the leash to restrain the dog in a heeling position, and can use the distraction end to distract the dog should it attempt to move forward of the heeling position or focus its attention on another dog or object. A hand receiving safety loop is provided at the handle end of the wand to assist the user in holding the assembly.