Patents by Inventor Erwin Hopf

Erwin Hopf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for producing a predetermined doping in side walls and bases of trenches etched into semiconductor substrates
    Patent number: 4782036
    Abstract: A process for producing a predetermined doping level in side walls and bases of trenches which have been etched into semiconductor substrates which involves treating the substrate with a gaseous atmosphere containing organic compounds of silicon, oxygen and boron in amounts sufficient to form a boron silicate glass, thermally decomposing the organic compounds to form the boron silicate glass as a layer deposit along the side walls and the bases and thereafter diffusing the layer deposit into the side walls and the base. This is followed by removing the layer deposit remaining after the predetermined amount of diffusion has taken place.
    Type: Grant
    Filed: July 16, 1987
    Date of Patent: November 1, 1988
    Assignee: Siemens Aktiengesellschaft
    Inventors: Frank Becker, Erwin Hopf