Patents by Inventor Erwin Littau

Erwin Littau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5581028
    Abstract: A semiconductor flow sensor provides a self-aligning seal between the sensor and a manifold carrying the fluid being measured. The sensor includes a sensing element and a semiconductor body having a fluid flow region formed therein. The sensing element crosses through a portion of the flow region and is supported by the semiconductor body. A characteristic of the fluid flowing through the flow region is measured by operation of the sensing element. A sealing ring integrally disposed on the semiconductor body surrounds the flow region and further provides a seal between the sensor and a manifold. To ensure accurate placement of the sealing ring with respect to the sensing element, the sealing ring is electroplated to the semiconductor body prior to formation of the flow region. A pressure and temperature stable seal between the sensor and the manifold is achieved by either compression of the sealing ring, or solder bonding of the sealing ring to the manifold.
    Type: Grant
    Filed: June 23, 1994
    Date of Patent: December 3, 1996
    Assignee: Hewlett Packard Company
    Inventors: Phillip W. Barth, Michel G. Goedert, Erwin Littau