Patents by Inventor Erwin Winter

Erwin Winter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS AND METHODS FOR DISTRIBUTING LIGHT DELIVERY
    Publication number: 20240160110
    Abstract: A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequence of intensities where substantially no light is delivered to the substrate and delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the sequence of intensities.
    Type: Application
    Filed: January 23, 2024
    Publication date: May 16, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Jasper WINTERS, Erwin John VAN ZWET, Marcus Johannes VAN DER LANS, Pieter Willem Herman DE JAGER, Geerten Frans Ijsbrand KRAMER
  • Apparatus for coating a substrate
    Patent number: 5688388
    Abstract: Pole shoes (3, 4, 5) of magnetically conductive material are provided inside of a first tubular target (2). Outside the target (2), a magnetic flux guide element (7) is provided, which has three pole shoes (8, 9, 10) directed toward the hollow body (1), which are connected to each other by magnets (12, 13). These magnets (12, 13) transmit the magnetic field through the target (2) to the pole shoes (3, 4, 5) inside the target (2) across narrow gaps (6, 11).
    Type: Grant
    Filed: July 29, 1996
    Date of Patent: November 18, 1997
    Assignee: Balzers und Leybold Deutschland Holding AG
    Inventors: Martin Bahr, Gunter Brauer, Erwin Winter
  • Apparatus for applying thin layers to a substrate
    Patent number: 5662784
    Abstract: Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.
    Type: Grant
    Filed: March 25, 1996
    Date of Patent: September 2, 1997
    Assignee: Leybold AG
    Inventors: Manfred Schuhmacher, Erwin Winter, Andreas Sauer, Dietmar Marquardt