Abstract: In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.

Abstract: In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.

Abstract: A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.

Abstract: A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.

Abstract: A vacuum coating system for coating elongate substrates includes one or several coating sections and one or several pump sections, at lease one magnetron in an arrangement as a sputter-down-variant above the substrate which has a target surface opposite the upper side of the substrate and/or in an arrangement as a sputter-up-variant below the substrate which has a target surface opposite the lower side of the substrate, and a transport device. The aim is to form an inline coating system for the two lateral coatings of elongate substrates, wherein construction costs and space required are reduced. The aim is achieved by use of a transport device arranged in a divided manner on a drive plane and on a transport plane. In sputter-up-variants, the underside of a magnetron body containing the magnetron lies above the drive plane.

Abstract: A coolable carrier plate for targets in vacuum atomization systems has a connection surface and at least one fastening support for connecting the carrier plate to a component provided for this purpose, at least one sealant for sealing the connection surface, at least one cavity for conveying a coolant with a coolant inlet and a coolant outlet, and a supporting surface for supporting a target. The cavity is formed by a coolant channel or network of coolant channels that runs inside the carrier plate.