Abstract: Methods for determining one or more operating parameters for a timing protocol of a microfluidic circuit are provided. In some embodiments, wet out times are measured for certain flow channels, and start times, flow rates and/or other parameters are calculated so that the various fluids in the microfluidic cartridge arrive at certain locations at a desired time and/or in a desired sequence. To help compensate for process variations, one or more fluidic process monitor components/structures may be fabricated along with the functional components/structures of a microfluidic cartridge. Test may be performed on the process monitor components/structures to help identify process variations in the particular microfluidic cartridge at hand. By using the process monitor data, the timing protocol for a particular microfluidic cartridge may be made more accurate.

Abstract: A pressure sensor includes a housing portion with a fluid inlet and a polymer element within the housing portion. The polymer element may be coated with piezoresistive material to form a first resistor and may have associated electrodes. The polymer element includes a first resistance value that changes to a second resistive value in a response to a predetermined condition. The pressure sensor may also include a second polymer element that includes a first resistance value that changes to a second resistive value in a response to a predetermined condition.

Abstract: An asymmetric micro pump may be adapted to provide a greater fluid compression between input and output ports of the micro pump, as well as increased flow rate due to higher actuation frequency. In some instances, asymmetric dual diaphragm micro pumps may be combined into assemblies to provide increased pressure build, improved pumping volume, or both, as desired.

Abstract: A drug delivery system for delivering a fluid to a desired location within a body that uses two control loops to control fluid flow: a first control loop in which a pressure source moves the fluid at an approximate rate, and a second control loop where a variable impedance mechanism more precisely controls the flow rate. After the fluid has moved through the chambers of these two control loops, a flow sensor measures the flow rate, sends the flow rate information to the control electronics, which then adjusts the pressure and impedance in a closed-loop manner to maintain a constant, desired flow rate. The drug delivery device may be used in portable or wearable mechanisms.

Abstract: MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis.

Abstract: A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the first and second chambers. There may be a first electrode on the diaphragm and a second electrode on an inside surface of the second chamber. The diaphragm may have first and second positions, or numerous variable positions. Applying a voltage across the electrodes may electrostatically move the diaphragm to the second position during which the outlet is at least partially opened for fluid communication with the inlet, the orifice is closed and the diaphragm is stopped in the second position by a cushioning fluid pressure in the second cavity to prevent pull-in. Removing the voltage from the electrodes may let the diaphragm return to the first position, open the orifice and close the outlet.

Abstract: MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis.

Abstract: A pressure sensor having a predetermined chamber dome angle with an electrode. A hole is located in the top to provide pressure readings and the bottom has an input port. A primary diaphragm is coated on both sides with an electrode and an insulator. A secondary diaphragm is coated on the side which faces the primary diaphragm. Offset holes are made in the two diaphragms which permits pressure equalization during self calibration. Both diaphragms are initially energized to seal the gage volume, and then the secondary diaphragm is used to self calibrate using a known pressure.

Abstract: A microvalve assembly that can help protect a microvalve or an assembly of microvalves from the environment. Such a microvalve assembly may be mechanically assembled, without the use of adhesives and/or other materials that might out-gas and/or otherwise reduce the performance of the electrostatically actuated devices contained therein. In particular, a microvalve assembly can include a base fixture, a clamp fixture that is configured to be attached to the base fixture, and an electrostatically actuated microvalve that is disposed between the base fixture and the clamp fixture. The clamp fixture may be mechanically secured to the base fixture.

Abstract: A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve can be opened by creating a pressure differential across the main valve. An electrostatically controlled pilot valve is provided for controlling the pressure differential across the main valve for “on-ff” operation. The electrostatically controlled pilot valve may also be operated to “modulate” the pressure differential across the main valve along a range of pressure differential values.

Abstract: A control system coupled to a pressure sensor calibrates the pressure sensor. The control system may measure a plurality of capacitance values at a plurality of corresponding applied voltages to compare the values with a first calibration mechanism generated by sample pressure sensors in a comparison. A final calibration mechanism may be generated by adjusting the first calibration mechanism in response to the comparison. The unknown differential pressure may be applied to a diaphragm of the pressure sensor. A capacitance value at the unknown differential pressure may then be measured. Using the final calibration mechanism, the differential pressure at the measured capacitance value may be retrieved.

Abstract: A dynamic micro-structured reflector includes a substrate having a generally planar major surface and a plurality of cavities on the planar major surface. Each cavity having at least a first and second sidewalls set at an angle offset from the planar major surface. The first sidewall being a stationary optical face and the second sidewall being a dynamic optical face. The dynamic optical face is deflectable between a first position and a second position. The dynamic optical face in the first position redirects more light back to a light source than the dynamic optical face in the second position. Methods of making a dynamic micro-structured reflector are also disclosed.

Abstract: A valve structure having a top part, a flexible media conveyance, such as a tube, a diaphragm and a bottom part with a support for the tube. The top surface of the diaphragm and the bottom surface of the top part may have electrodes attached. When there is no electric potential applied across the electrodes, the diaphragm may rest on and close the passageway in the flexible tube for effectively preventing a fluid flow. When an electrical potential is applied to the electrodes, the diaphragm may be pulled up off from the tube thereby opening or partially opening the passageway in the tube for a media flow or pressure transfer. Partial opening may be for modulation purposes. There may be a tension mechanism attached to the diaphragm. A controller may apply an electrical potential to the electrodes for at least partially opening or closing the valve.

Abstract: A device for sensing pressure using two flexible diaphragms in which an additional element is added to promote rolling contact of the diaphragm. One embodiment aligns the flexible diaphragms in a non-parallel alignment such that deflection of one flexible diaphragm will roll with respect to the other to provide increased linear capacitive response. In another embodiment a non-conductive spacing element is positioned between the diaphragms to permit rolling contact upon displacement of a diaphragms. These devices are capacitive pressure gauges. One additional embodiment includes a cantilever hinge and rigid polymer disc to convert one diaphragm into a linearly deflecting diaphragm.

Abstract: A dynamic micro-structured reflector includes a substrate having a generally planar major surface and a plurality of cavities on the planar major surface. Each cavity having at least a first and second sidewalls set at an angle offset from the planar major surface. The first sidewall being a stationary optical face and the second sidewall being a dynamic optical face. The dynamic optical face is deflectable between a first position and a second position. The dynamic optical face in the first position redirects more light back to a light source than the dynamic optical face in the second position. Methods of making a dynamic micro-structured reflector are also disclosed.

Abstract: A valve for regulating the flow of fluids (gas or liquid) using two flexible diaphragms in which an additional element is added to promote rolling contact between the diaphragms. The valve operates in a normally open configuration where fluid flows into the valve, passed through holes or openings in two electrostatically operative diaphragms and out of the valve. The holes or openings in one diaphragm are offset from the holes or openings in the other diaphragm, so that upon electro-static actuation, the diaphragms will seal together, closing the valve.

Abstract: An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.

Abstract: A device for sensing pressure using two perforated rigid films in which a diaphragm is mounted between the first two films. The device senses positive and negative pressure through a port or opening to the region for which pressure data is desired. The device communicates capacitive pressure and changes in that pressure. The flexible diaphragm is spaced from the first and second films such that the flexible diaphragm is adapted to flex toward the first film when pressure increases in the opening and is adapted to flex toward the second film when pressure decreases in the opening to change the capacitance between the diaphragm and at least one of the first and second films. Spacers are used to position all three elements.

Abstract: A device for sensing pressure including a chamber defining part having a first diaphragm mounted in communication with the sealed chamber defining part, and a second diaphragm electrically insulated from the first, preferably by a spacer. The diaphragms are flexible and have a conductive surface. A sensor chamber is mounted on the other side of the second diaphragm. It has an opening in communication with a sensing atmosphere. One of the diaphragms includes openings it its surface to permit fluid to flow through the openings and the other diaphragm is solid and responds to change in pressure in the sensor chamber to move away from or toward the one diaphragm. Electrical connections measure the capacitance between the diaphragms as a function of the pressure in the sensor chamber.

Abstract: An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.