Patents by Inventor Eugene L. Kimber

Eugene L. Kimber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation target charge control system
    Patent number: 5378899
    Abstract: A control system is provided for an ion implanter having an electron shower filament and a Faraday flag provided wherein the electron shower output is adjusted to maintain substantially continuous control of disk current during implantation, the control of the disk current of a target wafer during implantation being achieved by electrically isolating the target wafer, monitoring the disk current, and maintaining the electron shower filament current of the ion implanter at a level which permits rapid adjustment of the disk current during the time period required to close the Faraday flag.
    Type: Grant
    Filed: October 7, 1993
    Date of Patent: January 3, 1995
    Inventor: Eugene L. Kimber