Abstract: A method for extending scatterometry measurements of periodic structures created on a substrate into the deep UV and soft X-ray regions of the electromagnetic spectrum is presented. The method comprises measuring the scattering of a high harmonic generated (HHG) beam, which is created by a driving laser, that is scattered from the structures on the substrate. The scattered HHG beam is measured by a spectrometer or a detector sensitive to HHG radiation. Also presented is a system for carrying out the method.

Abstract: A method of making an optical system, including the steps of fabricating an optical subsystem of the optical system to within a first precision, measuring an aberration of the optical subsystem to within a second precision that is more precise than the first precision, and fabricating a static optical element that corrects the aberration to within the second precision.

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Abstract: A method of evaluating optical disturbances occurring in a flow field around a solid body. The method includes performing a computational fluid dynamics (CFD) calculation to obtain a three-dimensional index-of-refraction field outside the solid body, and performing one or more ray tracing calculation based on the sindex-of-refraction field to botain a numerical estimater of the optical disturbances.

Abstract: A method of evaluating optical disturbances occuring in a flow field around a solid body. The method includes performing a computational fluid dynamics (CFD) calculation to obtain a three-dimensional index-of-refraction field outside the solid body, and performing one or more ray tracing calculation based on the sindex-of-refraction field to botain a numerical estimater of the optical disturbances.

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.

Abstract: A method and system for monitoring a region of interest are presented. Incident radiation is transmitted towards the region of interest with a certain transmitting angle and with a predetermined angular intensity distribution of the incident radiation. The transmitting angle defines a plane of propagation of the incident radiation, the region of interest being located within this plane. Reflections of the incident radiation are collected with a solid angle of collection intersecting with said plane. A region of intersection presents a detecting window of a predetermined geometry containing at least a portion of the region of interest. The collected radiation coming from within the detecting window is detected, and output signals indicative thereof are generated.