Patents by Inventor Eyal Duzi

Eyal Duzi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum chuck having vacuum-nipples wafer support
    Patent number: 6257564
    Abstract: A vacuum chuck is disclosed which has nipples as support structure and for vacuum delivery. In the preferred embodiment, two types of nipples are used: “plain” nipples which provide only support and vacuum nipples which provide support and deliver vacuum to retain the wafer on the chuck. The contact surface of the plain nipples is made smaller than that of the vacuum nipples. The chuck is secured to a stage using special supports which have limited flexibility in two axis with respect to the chuck, so as to prevent warping the chuck. Special vacuum nipples are disclosed which do not deliver vacuum unless the wafer exerts sufficient predetermined pressure on the nipple. The chuck is designed to hold both 200 mm and 300 mm wafers.
    Type: Grant
    Filed: May 15, 1998
    Date of Patent: July 10, 2001
    Assignee: Applied Materials, Inc
    Inventors: Israel Avneri, Eyal Duzi, Dvir Keren, Avner Regev