Patents by Inventor Fabrice Paccoret

Fabrice Paccoret has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN
    Publication number: 20200132608
    Abstract: The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 30, 2020
    Inventors: Raymond Chu, Andrew Zeng, Donald Pettibone, Chunsheng Huang, Bret Whiteside, Fabrice Paccoret, Xuan Wang, Chuanyong Huang, Steve Xu, Anatoly Romanovsky