Abstract: A mounting fixture of an apparatus for clamping a film includes a platform, a barricade, and fixing members. A surface of the platform includes a first fixing portion, and second and third fixing portions which are opposite to the first fixing portion. The second fixing portion is adjacent to the third fixing portion and located between the first and third fixing portions. The barricade is disposed on the surface between the second and third fixing portions and has channels. The fixing members are disposed on the surface. First, second, and third bars of the apparatus are disposed on the first, second, and third fixing portions, the barricade is located between the second and third bars, and the channels receive elastic elements of the apparatus. Each elastic element has two ends disposed on the second and third bars. The fixing members can fix the first and third bar.

Abstract: A clamping apparatus of a soft film and a mounting fixture thereof are described. The clamping apparatus includes a first bar, a second bar, a third bar, and at least one elastic element. The first bar and second bar are respectively configured to fix a first side portion and a second side portion of a soft film. The third bar is adjacent and connected to the second bar. The third bar and the first bar are respectively located on two opposite sides of the second bar. The third bar is configured to pull the soft film from the second side portion of the soft film through the second bar. The elastic element has a first end and a second end opposite to each other and respectively disposed on the second bar and the third bar. The elastic element is configured to provide the soft film with pull buffer.

Abstract: A clamping apparatus of a soft film and a mounting fixture thereof are described. The clamping apparatus includes a first bar, a second bar, a third bar, and at least one elastic element. The first bar and second bar are respectively configured to fix a first side portion and a second side portion of a soft film. The third bar is adjacent and connected to the second bar. The third bar and the first bar are respectively located on two opposite sides of the second bar. The third bar is configured to pull the soft film from the second side portion of the soft film through the second bar. The elastic element has a first end and a second end opposite to each other and respectively disposed on the second bar and the third bar. The elastic element is configured to provide the soft film with pull buffer.

Abstract: A clamping apparatus of a soft film and a mounting fixture thereof are described. The clamping apparatus includes a first bar, a second bar, a third bar, and at least one elastic element. The first bar and second bar are respectively configured to fix a first side portion and a second side portion of a soft film. The third bar is adjacent and connected to the second bar. The third bar and the first bar are respectively located on two opposite sides of the second bar. The third bar is configured to pull the soft film from the second side portion of the soft film through the second bar. The elastic element has a first end and a second end opposite to each other and respectively disposed on the second bar and the third bar. The elastic element is configured to provide the soft film with pull buffer.

Abstract: A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.

Abstract: A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.

Abstract: A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.

Abstract: A wafer cassette includes a front plate and a rear plate disposed opposite to face each other; and at least two top elongated rods, at least two middle elongated rods and at least two bottom elongated rods, each having a plurality of grooves shaped thereinto. The top elongated rods, the middle elongated rods and the bottom elongated rods each has two ends being pivotally connected to the front plate and the rear plate, respectively. The top elongated rods, the middle elongated rods and the bottom elongated rods each comprises a solid-iron rod enclosed with a cladding layer.

Abstract: A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.