Abstract: A method for scanning a semiconductor layout, the layout comprising objects with edges and corners, the method comprising identifying locally closest point pairs, identifying a proximity relation between two parallel edges where the parallel edges have at least one locally closest point pair in common and storing the proximity relation in a proximity relations table of a database together with a reference to the corresponding pair of edges. Locally closest point pairs are identified where the first edge and the second edge are not in contact with each other, a distance between the first point and the second point is the shortest distance between the first edge and the second edge, and a convex bounding area with the first point and the second point on its boundary contains no edge.

Abstract: A method of modification of a semiconductor layout is provided. The layout comprises objects of semiconductor material with corners and edges. The method comprises a step of receiving (61) a set of proximities, triggers and design rules, the proximities indicating relations between neighboring edges and/or corners, the triggers defining boundaries for the modification within which boundaries the proximities are valid, the design rules describing physical requirements for the semiconductor layout. The method further comprises a step of generating (62) a set of constraints, based on the received proximities, triggers and design rules, each constraint in the set of constraints defining a limit within which the semiconductor layout may be modified without changing the proximities. Then the set of constraints to obtain a modified semiconductor layout is solved (63).

Abstract: A method of modification of a semiconductor layout is provided. The layout comprises objects of semiconductor material with corners and edges. The method comprises a step of receiving (61) a set of proximities, triggers and design rules, the proximities indicating relations between neighboring edges and/or corners, the triggers defining boundaries for the modification within which boundaries the proximities are valid, the design rules describing physical requirements for the semiconductor layout. The method further comprises a step of generating (62) a set of constraints, based on the received proximities, triggers and design rules, each constraint in the set of constraints defining a limit within which the semiconductor layout may be modified without changing the proximities. Then the set of constraints to obtain a modified semiconductor layout is solved (63).

Abstract: A method for scanning a semiconductor layout, the layout comprising objects with edges and corners, the method comprising identifying locally closest point pairs, identifying a proximity relation between two parallel edges where the parallel edges have at least one locally closest point pair in common and storing the proximity relation in a proximity relations table of a database together with a reference to the corresponding pair of edges. Locally closest point pairs are identified where the first edge and the second edge are not in contact with each other, a distance between the first point and the second point is the shortest distance between the first edge and the second edge, and a convex bounding area with the first point and the second point on its boundary contains no edge.