Abstract: A support ring (1) for rolling bearings (11), especially for rolling bearings applied to rotors with very high rotation speed, such as rotors of rotary vacuum pumps, the ring comprising a pair of concentric cylindrical shells (3, 5) connected together by a plurality of oblique radial plates (9), at least one of said shells (3, 5) being circumferentially broken so as to define a plurality of shoes (7), each shoe being connected to at least one of the radial plates (9) in such a manner as to define shoe portions or arcs (A1, A2) of different length, wherein the plates (9) are resilient and allow for the radial displacement of the shoes (7) so as to restrain vibrations of the rotating portion.

Abstract: A compact turbomolecular vacuum pump (1) is driven by a cup-type motor (8). The cup-shaped rotor of the motor is preferably integrated into the pump rotor (14) and may define corresponding pumping stages, for instance Holweck stages, wherein the stators (11, 12) of said stages being preferably obtained by superimposing stator rings (11?, 12?).

Abstract: A process for manufacturing stators of vacuum pumps, and stators obtained thereby, wherein a plurality of stator discs or rings are formed, preferably by pressing, and then stator discs or rings are coaxially stacked and mutually rotated so as to form a stator surface having defined thereon at least one groove extending in substantially axial direction with respect to a body of the stator.

Abstract: A rotary vacuum pump (101; 201) comprising displacement sensors (121A-121F; 221A-221F), variously coupled to the pump basement (103; 203) and arranged close to the pump rotor (113; 213) and/or to the rotating shaft (105; 205) thereof, the sensors being turned towards it (them) and being perpendicular thereto, in order to detect non-homogeneous distributions, if any, of masses of said rotor (113; 213) with respect to its rotation axis. The invention also relates to a structure for and a method of balancing a rotary pump.

Abstract: A support ring (1) for rolling bearings (11), especially for rolling bearings applied to rotors with very high rotation speed, such as rotors of rotary vacuum pumps, the ring comprising a pair of concentric cylindrical shells (3, 5) connected together by a plurality of oblique radial plates (9), at least one of said shells (3, 5) being circumferentially broken so as to define a plurality of shoes (7), each shoe being connected to at least one of the radial plates (9) in such a manner as to define shoe portions or arcs (A1, A2) of different length, wherein the plates (9) are resilient and allow for the radial displacement of the shoes (7) so as to restrain vibrations of the rotating portion.

Abstract: A vacuum pump assembly is provided with a vacuum pump and external unit coupled by a vibration damper. The vibration damper comprises a plurality of piezoelectric actuators and a plurality of sensors. Actuators attenuate vibration propagated from the pump to the external unit to which the pump is connected and/or vice versa, while the sensors are capable of providing a measure of the vibrations to controlling said actuators.

Abstract: A compact turbomolecular vacuum pump (1) is driven by a cup-type motor (8). The cup-shaped rotor of the motor is preferably integrated into the pump rotor (14) and may define corresponding pumping stages, for instance Holweck stages, wherein the stators (11, 12) of said stages being preferably obtained by superimposing stator rings (11′, 12′).

Abstract: A process for manufacturing stators of vacuum pumps, and stators obtained thereby, wherein a plurality of stator discs or rings are formed, preferably by pressing, and then stator discs or rings are coaxially stacked and mutually rotated so as to form a stator surface having defined thereon at least one groove extending in substantially axial direction with respect to a body of the stator.

Abstract: A rotor having a set of radial peripheral vanes for a high vacuum turbomolecular pump is manufactured by forging a metal workpiece to obtain a generally cylindrical body (1,11) with homogeneous mechanical properties and subsequent mechanical workings.

Abstract: A vacuum pump (11) comprises a body (1), a rotor member (9) having a plurality of rotor disks (12) coupled to corresponding plurality of stator rings integral to the body (1). The rotor, member has an axial bell-shaped cavity (13). A rotating shaft (15) and an electric motor (7, 8) are disposed within the axial bell-shaped cavity (13). The rotating shaft (15) is supported by rotation supporting means (5a, 5b). The electric motor comprises a stator (7) integral to the body (1) of the vacuum pump (11) and a rotor (8) coupled to the internal surface of the axial bell-shaped cavity (13) of the rotor member (9).

Abstract: A vacuum pump a the magnetic bearing assembly includes the magnetic bearing assembly with rotor position sensors and backup bearings being placed inside the rotatable shaft of the vacuum pump. The sensor placements are independent of the bearing position, so that the respective radial sensors can be at the same axial position as the respective radial bearings, which provides sensors co-location and a space saving within a turbopump housing, in particular, in its axial direction, while sensors and mechanical backup bearings are placed in a better protected area with respect to pumped corrosive gases.

Abstract: A vacuum pump is provided with back-up bearings in addition to magnetic bearings for supporting its rotor with respect to the pump housing. The rotor has a hollow rotary shaft extending backwards enclosing in its inner space a forwardly protruding tubular shaft affixed to the pump housing, and another cylindrical member affixed to the rotor protrudes backward inside this fixed tubular shaft. One set of back-up bearings is provided on the outer surface of the fixed tubular shaft spaced from the inner surface of the rotor shaft and another set of back-up bearings is provided on the inner surface of the fixed tubular shaft, spaced from the protruding cylindrical member. The back-up bearings thus positioned can be made smaller for improved dynamic emergency capabilities.

Abstract: A vacuum pump has a back-up bearing assembly for allowing its rotor to spin down safely without damaging the pump if the primary bearing system becomes disabled. The drive shaft of the rotor is tubular and contains the back-up bearing assembly in its hollow interior. Back-up bearings are mounted onto a tubular center shaft which is coaxial with and inside the drive shaft. An axial position sensor is nested inside the center shaft and light emitted from its light emitter is reflected by a reflective target inside the drive shaft to detect the relative axial position of the drive shaft with respect to the center shaft. A polymer sleeve is attached to the end of the drive shaft as a thermal compensator, which restricts the axial movement of the drive shaft.

Abstract: A rotatable assembly for supporting the rotor of a vacuum pump with a plurality of gas pumping stages formed by cooperating rotor discs secured to the rotor and stator rings integral with a body, comprising rotatable means for supporting the shaft of the rotor that are housed within this shaft.

Abstract: A high vacuum pump comprising an in-line connection on a single drive shaft of an axial turbomolecular compressor and a peripheral compressor where the pump provides better than 10.sup.-7 Pascal inlet when exhausting to atmosphere. The peripheral compressor has a two stage optimized Gaede design which encloses the impellers in a shroud reducing the top and bottom volume surrounding the impellers and providing a large separation pressure drop region between stages of said peripheral compressors to reduce axial leakage.

Abstract: In a stator assembly for a turbomolecular pump, each stator is assembled from two semicircular portions mutually aligned and secured in place by tongue and grooves means, each such stator including a plurality of radially directed blades connecting an inner circular edge and outer circular edge of the stator, such edges occupying respective parallel displaced planes. The outer edge of each stator includes regularly outward projected tabs which bear between spacer rings to maintain axial alignment.