Patents by Inventor Fei-Yuh Chen

Fei-Yuh Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9601585
    Abstract: A transistor includes an isolation region surrounding an active region. The transistor also includes a gate dielectric layer over a portion of the active region. The transistor further includes a gate electrode over the gate dielectric layer. The portion of the active region under the gate dielectric layer includes a channel region between a drain region and a source region, and at least one wing region adjoining the channel region. The at least one wing region has a base edge adjoining the channel region. The at least one wing region is polygonal or curved.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: March 21, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Yi-Sheng Chen, Shih-Kuang Hsiao, Chun Lin Tsai, Kong-Beng Thei
  • Patent number: 9299806
    Abstract: An integrated circuit and a method of forming is provided. The method includes forming a first well in a substrate, the first well having a first conductivity type, and forming a first source/drain region in the first well, the first source/drain region having a second conductivity type. A resistance protection ring is formed on the substrate.
    Type: Grant
    Filed: May 18, 2015
    Date of Patent: March 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Sheng Chen, Chen-Liang Chu, Shih-Kuang Hsiao, Fei-Yuh Chen, Kong-Beng Thei
  • Publication number: 20150295055
    Abstract: A transistor includes an isolation region surrounding an active region. The transistor also includes a gate dielectric layer over a portion of the active region. The transistor further includes a gate electrode over the gate dielectric layer. The portion of the active region under the gate dielectric layer includes a channel region between a drain region and a source region, and at least one wing region adjoining the channel region. The at least one wing region has a base edge adjoining the channel region. The at least one wing region is polygonal or curved.
    Type: Application
    Filed: June 26, 2015
    Publication date: October 15, 2015
    Inventors: Chen-Liang CHU, Fei-Yuh CHEN, Yi-Sheng CHEN, Shih-Kuang HSIAO, Chun Lin TSAI, Kong-Beng THEI
  • Publication number: 20150249144
    Abstract: An integrated circuit and a method of forming is provided. The method includes forming a first well in a substrate, the first well having a first conductivity type, and forming a first source/drain region in the first well, the first source/drain region having a second conductivity type. A resistance protection ring is formed on the substrate.
    Type: Application
    Filed: May 18, 2015
    Publication date: September 3, 2015
    Inventors: Yi-Sheng Chen, Chen-Liang Chu, Shih-Kuang Hsiao, Fei-Yuh Chen, Kong-Beng Thei
  • Patent number: 9099556
    Abstract: A semiconductor device includes an active region having a channel region and at least a wing region adjoining the channel region under the gate dielectric layer. The at least one wing region may be two symmetrical wing regions across the channel region.
    Type: Grant
    Filed: August 19, 2011
    Date of Patent: August 4, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Yi-Sheng Chen, Shih-Kuang Hsiao, Chun Lin Tsai, Kong-Beng Thei
  • Patent number: 9070663
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: June 30, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
  • Patent number: 8673712
    Abstract: Presented herein is a field effect transistor device, optionally a lateral power transistor, and a method for forming the same, comprising providing a substrate, creating a doped buried layer, and creating a primary well in the substrate on the buried layer. A drift drain may be created in the primary well and a counter implant region implanted in the primary well and between the drift drain and the buried layer. The primary well may comprise a first and second implant region with the second implant region at a depth less than the first. The counter implant may be at a depth between the first and second implant regions. The primary well and counter implant region may comprise dopants of the same conductivity type, or both p+-type dopants. A gate may be formed over a portion of a drift drain.
    Type: Grant
    Filed: July 20, 2012
    Date of Patent: March 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Kuang Hsiao, Chen-Liang Chu, Yi-Sheng Chen, Fei-Yuh Chen, Kong-Beng Thei
  • Publication number: 20130337644
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Application
    Filed: August 16, 2013
    Publication date: December 19, 2013
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
  • Patent number: 8513712
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Grant
    Filed: September 28, 2009
    Date of Patent: August 20, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
  • Publication number: 20130043533
    Abstract: A semiconductor device includes an active region having a channel region and at least a wing region adjoining the channel region under the gate dielectric layer. The at least one wing region may be two symmetrical wing regions across the channel region.
    Type: Application
    Filed: August 19, 2011
    Publication date: February 21, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang CHU, Fei-Yuh CHEN, Yi-Sheng CHEN, Shih-Kuang HSIAO, Chun Lin TSAI, Kong-Beng THEI
  • Patent number: 8377787
    Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the semiconductor substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.
    Type: Grant
    Filed: June 8, 2011
    Date of Patent: February 19, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
  • Patent number: 8183626
    Abstract: An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
    Type: Grant
    Filed: February 14, 2011
    Date of Patent: May 22, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Tsung-Yi Huang, Fei-Yuh Chen
  • Publication number: 20110237041
    Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the semiconductor substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.
    Type: Application
    Filed: June 8, 2011
    Publication date: September 29, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
  • Patent number: 7977743
    Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: July 12, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
  • Publication number: 20110163375
    Abstract: An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
    Type: Application
    Filed: February 14, 2011
    Publication date: July 7, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Tsung-Yi Huang, Fei-Yuh Chen
  • Publication number: 20110073962
    Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.
    Type: Application
    Filed: September 28, 2009
    Publication date: March 31, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
  • Patent number: 7888734
    Abstract: An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: February 15, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Tsung-Yi Huang, Fei-Yuh Chen
  • Publication number: 20100213542
    Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.
    Type: Application
    Filed: February 25, 2009
    Publication date: August 26, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
  • Publication number: 20100140687
    Abstract: An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
    Type: Application
    Filed: December 4, 2008
    Publication date: June 10, 2010
    Inventors: Chen-Liang Chu, Chun-Ting Liao, Tsung-Yi Huang, Fei-Yuh Chen
  • Patent number: 7205176
    Abstract: An MEMS mirror structure is formed using an etching process that forms sidewall oxide spacers while maintaining the integrity of the oxide layer formed over the reflective layer of the MEMS mirror structure. The discrete mirror structure is formed to include a reflective layer sandwiched between oxide layers and with a protect layer formed over the upper oxide layer. A spacer oxide layer is formed to cover the structure and oxide spacers are formed on sidewalls of the discrete structure using a selective etch process that is terminated when horizontal portions of the spacer oxide layer have cleared to expose the release layer formed below the discrete mirror structure and the protect layer. The superjacent protect layer prevents the spacer oxide etch process from attacking the upper oxide layer and therefore maintains the integrity of the upper oxide layer and the functionality of the mirror structure.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: April 17, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Fei-Yuh Chen, Wei-Ya Wang, Yuh-Hwa Chang, Tzu-Yang Wu