Patents by Inventor Feiyang Wu
Feiyang Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9322795Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.Type: GrantFiled: April 22, 2013Date of Patent: April 26, 2016Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20130241581Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.Type: ApplicationFiled: April 22, 2013Publication date: September 19, 2013Applicant: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Patent number: 8519724Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.Type: GrantFiled: September 29, 2008Date of Patent: August 27, 2013Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Patent number: 8269510Abstract: A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.Type: GrantFiled: September 29, 2008Date of Patent: September 18, 2012Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Patent number: 7973539Abstract: A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.Type: GrantFiled: February 17, 2011Date of Patent: July 5, 2011Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20110140715Abstract: A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.Type: ApplicationFiled: February 17, 2011Publication date: June 16, 2011Applicant: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Patent number: 7911213Abstract: A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.Type: GrantFiled: September 29, 2008Date of Patent: March 22, 2011Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Patent number: 7777500Abstract: Characterizing dielectric properties of a part includes placing a full-sized part within a dielectric property measurement apparatus. In one embodiment, the full-sized part is a dielectric part of a plasma processing system. The dielectric property measurement apparatus is operated to determine a dielectric constant value of the full-sized part and a loss tangent value of the full-sized part. The determined dielectric constant and loss tangent values are affixed to the full-sized part.Type: GrantFiled: September 29, 2008Date of Patent: August 17, 2010Assignee: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20100079152Abstract: A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.Type: ApplicationFiled: September 29, 2008Publication date: April 1, 2010Applicant: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20090091341Abstract: A plate of substantially uniform thickness is formed from an electrically conductive material. The plate has a top surface defined to support a part to be measured. The plate has a bottom surface defined to be connected to a radiofrequency (RF) transmission rod such that RF power can be transmitted through the RF transmission rod to the plate. The plate is defined to have a number of holes cut vertically through the plate at a corresponding number of locations that underlie embedded conductive material items in the part to be measured when the part is positioned on the top surface of the plate.Type: ApplicationFiled: September 29, 2008Publication date: April 9, 2009Applicant: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20090091335Abstract: Characterizing dielectric properties of a part includes placing a full-sized part within a dielectric property measurement apparatus. In one embodiment, the full-sized part is a dielectric part of a plasma processing system. The dielectric property measurement apparatus is operated to determine a dielectric constant value of the full-sized part and a loss tangent value of the full-sized part. The determined dielectric constant and loss tangent values are affixed to the full-sized part.Type: ApplicationFiled: September 29, 2008Publication date: April 9, 2009Inventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu
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Publication number: 20090091340Abstract: A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.Type: ApplicationFiled: September 29, 2008Publication date: April 9, 2009Applicant: Lam Research CorporationInventors: Jaehyun Kim, Arthur H. Sato, Keith Comendant, Qing Liu, Feiyang Wu