Patents by Inventor Felice J. Mancaruso

Felice J. Mancaruso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Aqueous cleaning of polymer apply equipment
    Patent number: 6635118
    Abstract: This invention relates to water-based alkaline cleaning solutions and their use as an environmentally safer replacement of organic solvents to remove photoresist, polyimide residue and other interlevel dielectric polymer coating residue from polymer film apply equipment, specifically, spin coater bowl and assembly parts consisting of a teflon top shield, stainless steel plate, and a bottom teflon spin coating bowl used in semiconductor device fabrication processes.
    Type: Grant
    Filed: January 17, 2001
    Date of Patent: October 21, 2003
    Assignee: International Business Machines Corporation
    Inventors: Harbans S. Sachdev, Richard A. Cormack, Gerard V. Capogna, Felice J. Mancaruso, Krishna Sachdev
  • Aqueous cleaning of polymer apply equipment
    Publication number: 20020094939
    Abstract: This invention relates to water-based alkaline cleaning solutions and their use as an environmentally safer replacement of organic solvents to remove photoresist, polyimide residue and other interlevel dielectric polymer coating residue from polymer film apply equipment, specifically, spin coater bowl and assembly parts consisting of a teflon top shield, stainless steel plate, and a bottom teflon spin coating bowl used in semiconductor device fabrication processes.
    Type: Application
    Filed: January 17, 2001
    Publication date: July 18, 2002
    Applicant: International Business Machines Corporation
    Inventors: Harbans S. Sachdev, Richard A. Cormack, Gerard V. Capogna, Felice J. Mancaruso, Krishna Sachdev