Abstract: In one embodiment, a micro-gyro device for measuring rotational movement about an input axis includes a driving element generating a driving signal. A MEMS gyro includes a motor rotor and a motor assembly. The motor rotor receives the driving signal and oscillates about a motor axis at a frequency determined as a function of the driving signal. The motor assembly oscillates around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation. A capacitance of the motor assembly changes as a function of the oscillation of the motor assembly. Driving element feedback circuitry, including a first band-pass filter, is between the motor rotor and the driving element. The driving element feedback circuitry causes the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range.

Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

Abstract: A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.

Abstract: In one embodiment, a micro-gyro device for measuring rotational movement about an input axis includes a driving element generating a driving signal. A MEMS gyro includes a motor rotor and a motor assembly. The motor rotor receives the driving signal and oscillates about a motor axis at a frequency determined as a function of the driving signal. The motor assembly oscillates around a rate axis, which is orthogonal to the motor axis, as a function of the frequency of the motor rotor oscillation. A capacitance of the motor assembly changes as a function of the oscillation of the motor assembly. Driving element feedback circuitry, including a first band-pass filter, is between the motor rotor and the driving element. The driving element feedback circuitry causes the driving element to generate the driving signal as a function of an amplitude of the motor rotor oscillation for maintaining the amplitude of the motor rotor oscillation within a predetermined range.

Abstract: A single-axis, fluxgate magnetometer apparatus comprises: an excitation subassembly comprising a toroidal core wound with a predetermined number of turns of an excitation coil; and a pick up subassembly comprising a coil form including a hollow chamber, and a predetermined number of turns of a pick up coil wound on the coil form about the hollow chamber, the excitation subassembly disposed in the hollow chamber of the coil form and secured in the hollow chamber at a desired position. A method of adjusting the single-axis, fluxgate magnetometer apparatus comprises the steps of: applying an excitation signal to the excitation coil while disposed in the hollow chamber; monitoring a signal waveform of the pick up coil responsive to the excited excitation coil; adjusting the position of the excitation subassembly in the hollow chamber to effect a desired signal waveform of the pick up coil; and securing the excitation subassembly in the hollow chamber at the position that provides the desired signal waveform.

Abstract: A single-axis, fluxgate magnetometer apparatus comprises: an excitation subassembly comprising a toroidal core wound with a predetermined number of turns of an excitation coil; and a pick up subassembly comprising a coil form including a hollow chamber, and a predetermined number of turns of a pick up coil wound on the coil form about the hollow chamber, the excitation subassembly disposed in the hollow chamber of the coil form and secured in the hollow chamber at a desired position. A method of adjusting the single-axis, fluxgate magnetometer apparatus comprises the steps of: applying an excitation signal to the excitation coil while disposed in the hollow chamber; monitoring a signal waveform of the pick up coil responsive to the excited excitation coil; adjusting the position of the excitation subassembly in the hollow chamber to effect a desired signal waveform of the pick up coil; and securing the excitation subassembly in the hollow chamber at the position that provides the desired signal waveform.