Patents by Inventor Fengchuan XU

Fengchuan XU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Real-time variable parameter micro-nano optical field modulation system and interference lithography system
    Patent number: 10054859
    Abstract: A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: August 21, 2018
    Assignee: SOOCHOW UNIVERSITY
    Inventors: Yan Ye, Fengchuan Xu, Guojun Wei, Yishen Xu, Donglin Pu, Linsen Chen
  • REAL-TIME VARIABLE PARAMETER MICRO-NANO OPTICAL FIELD MODULATION SYSTEM AND INTERFERENCE LITHOGRAPHY SYSTEM
    Publication number: 20180039183
    Abstract: A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.
    Type: Application
    Filed: January 6, 2016
    Publication date: February 8, 2018
    Inventors: Yan YE, Fengchuan XU, Guojun WEI, Yishen XU, Donglin PU, Linsen CHEN