Patents by Inventor Ferdinand Bell

Ferdinand Bell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring a production process using a linear combination of measured variables with selected weights
    Patent number: 7479395
    Abstract: The invention relates to a method for monitoring a manufacturing process, which by using a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for determining each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
    Type: Grant
    Filed: July 25, 2002
    Date of Patent: January 20, 2009
    Assignee: Infineon Technologies AG
    Inventors: Ferdinand Bell, Dirk Knobloch, Knut Voigtländer, Jan Zimpel
  • Method for monitoring a semiconductor fabrication process for processing a substrate
    Patent number: 6643559
    Abstract: The invention relates to a method for monitoring a production process, whereby several models are used for detecting a finish point. The results of the model are subsequently compared with one another and the best model therefrom is used in other production processes to detect a finish point. The inventive method provides the advantage that process changes resulting from chamber contaminations or sensor drift are compensated for by selecting the best model, thereby ensuring reliable finish point detection even in case of unfavorable process conditions.
    Type: Grant
    Filed: February 12, 2002
    Date of Patent: November 4, 2003
    Assignee: Infineon Technologies AG
    Inventor: Ferdinand Bell
  • Method of monitoring a production process
    Publication number: 20030008507
    Abstract: The invention relates to a method for monitoring a manufacturing process, which by using a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for determining each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
    Type: Application
    Filed: July 25, 2002
    Publication date: January 9, 2003
    Inventors: Ferdinand Bell, Dirk Knobloch, Knut Voigtlander, Jan Zimpel
  • Method for monitoring a semiconductor fabrication process for processing a substrate
    Publication number: 20020119668
    Abstract: The invention relates to a method for monitoring a production process, whereby several models are used for detecting a finish point. The results of the model are subsequently compared with one another and the best model therefrom is used in other production processes to detect a finish point. The inventive method provides the advantage that process changes resulting from chamber contaminations or sensor drift are compensated for by selecting the best model, thereby ensuring reliable finish point detection even in case of unfavorable process conditions.
    Type: Application
    Filed: February 12, 2002
    Publication date: August 29, 2002
    Inventor: Ferdinand Bell