Patents by Inventor Francis G. Goodwin

Francis G. Goodwin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of identifying space within integrated circuit structure as mandrel space or non-mandrel space
    Patent number: 10622266
    Abstract: The disclosure is directed to methods of identifying a space within an integrated circuit structure as a mandrel space or a non-mandrel space. One method may include: identifying a space between freestanding spacers as being one of: a former mandrel space created by removal of a mandrel from between the freestanding spacers or a non-mandrel space between adjacent mandrels prior to removal of the mandrel, based on a line width roughness of the space, wherein the line width roughness represents a deviation of a width of the space from a centerline axis along a length of the space.
    Type: Grant
    Filed: April 4, 2017
    Date of Patent: April 14, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Erik A. Verduijn, Genevieve Beique, Nicholas V. LiCausi, Lei Sun, Francis G. Goodwin
  • METHODS OF IDENTIFYING SPACE WITHIN INTEGRATED CIRCUIT STRUCTURE AS MANDREL SPACE OR NON-MANDREL SPACE
    Publication number: 20180286681
    Abstract: The disclosure is directed to methods of identifying a space within an integrated circuit structure as a mandrel space or a non-mandrel space. One method may include: identifying a space between freestanding spacers as being one of: a former mandrel space created by removal of a mandrel from between the freestanding spacers or a non-mandrel space between adjacent mandrels prior to removal of the mandrel, based on a line width roughness of the space, wherein the line width roughness represents a deviation of a width of the space from a centerline axis along a length of the space.
    Type: Application
    Filed: April 4, 2017
    Publication date: October 4, 2018
    Inventors: Erik A. Verduijn, Genevieve Beique, Nicholas V. LiCausi, Lei Sun, Francis G. Goodwin