Patents by Inventor Francisco CAMARGO

Francisco CAMARGO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for liquid treatment of wafer shaped articles
    Patent number: 9799539
    Abstract: In an apparatus for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A liquid dispenser comprises a check valve positioned so as to prevent process liquid from dripping out of a discharge nozzle of the liquid dispenser. A valve seat of the check valve is at a distance in a range of 20 mm to 100 mm from an outlet opening of said discharge nozzle.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: October 24, 2017
    Assignee: LAM RESEARCH AG
    Inventor: Francisco Camargo
  • Apparatus for processing wafer-shaped articles
    Patent number: 9616451
    Abstract: The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block that blows the droplets off the nozzle outer surface before they can coalesce and drop in an uncontrolled manner onto the work piece. The nozzle preferably has a polished and tapered outer surface to aid in blowing off any accumulated droplets of process liquid from the outer surface.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: April 11, 2017
    Assignee: LAM RESEARCH AG
    Inventors: Mike Daniel Kollmann, Christian Thomas Fischer, Francisco Camargo
  • METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
    Publication number: 20150364345
    Abstract: In an apparatus for treating a wafer-shaped article, a spin chuck is provided for holding and rotating a wafer-shaped article. A liquid dispenser comprises a check valve positioned so as to prevent process liquid from dripping out of a discharge nozzle of the liquid dispenser. A valve seat of the check valve is at a distance in a range of 20 mm to 100 mm from an outlet opening of said discharge nozzle.
    Type: Application
    Filed: June 16, 2014
    Publication date: December 17, 2015
    Inventor: Francisco CAMARGO
  • APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
    Publication number: 20140137908
    Abstract: The harmful effects of accumulating droplets of process liquid on the outer surface of a dispense nozzle are prevented by equipping an apparatus for process wafer-shaped articles with a blow-off block that blows the droplets off the nozzle outer surface before they can coalesce and drop in an uncontrolled manner onto the work piece. The nozzle preferably has a polished and tapered outer surface to aid in blowing off any accumulated droplets of process liquid from the outer surface.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Applicant: LAM RESEARCH AG
    Inventors: Mike Daniel KOLLMANN, Christian Thomas FISCHER, Francisco CAMARGO