Patents by Inventor Francoise S. Sandroff

Francoise S. Sandroff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature measurement in a processing chamber using in-situ monitoring of photoluminescence
    Patent number: 5213985
    Abstract: A relatively simple optical monitoring technique is utilized to measure temperature within a processing chamber. A III-V direct-bandgap semiconductor is optically excited to emit photoluminescence (PL). Spectral resolution of the emitted PL provides a direct measure of the bandgap of the semiconductor. In turn, the temperature of the semiconductor is derived from the bandgap measurement.
    Type: Grant
    Filed: May 22, 1991
    Date of Patent: May 25, 1993
    Assignee: Bell Communications Research, Inc.
    Inventors: Claude J. Sandroff, Francoise S. Sandroff