Patents by Inventor Frank J. C. Chang

Frank J. C. Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof
    Patent number: 6305062
    Abstract: A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.
    Type: Grant
    Filed: April 21, 2000
    Date of Patent: October 23, 2001
    Assignee: Winbond Electronics Corp.
    Inventors: Ting-Kou Chen, Yong-Sen Liao, Frank J. C. Chang
  • Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof
    Publication number: 20010018790
    Abstract: A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.
    Type: Application
    Filed: May 11, 2001
    Publication date: September 6, 2001
    Applicant: Winbond Electronics Corp.
    Inventors: Ting-kou Chen, Yong-Sen Liao, Frank J.C. Chang