Patents by Inventor Frank Quan

Frank Quan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photoresist recirculation and viscosity control for dip coating applications
    Publication number: 20040209000
    Abstract: A method of performing dip coating of a layer of a resist material on a surface of a substrate, comprising steps of:
    Type: Application
    Filed: May 11, 2004
    Publication date: October 21, 2004
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Donald Everett Curtiss, Joseph Leigh, Frank Quan
  • Photoresist recirculation and viscosity control for dip coating applications
    Patent number: 6740163
    Abstract: A method of performing dip coating of a layer of a resist material on a surface of a substrate, comprising steps of: (a) providing a dip coating vessel having an interior space containing a dip coating liquid comprising a solution of the resist material in a solvent, the dip coating vessel being open at the top thereof; (b) providing a substrate having a surface, immersing the substrate in the dip coating liquid in the vessel via the open top, and withdrawing the substrate from the vessel via the open top thereof, thereby forming a layer of resist material on the surface; and (c) monitoring and maintaining the viscosity of the dip coating liquid supplied to the dip coating vessel at a predetermined value. Also disclosed is an apparatus for performing the method.
    Type: Grant
    Filed: December 19, 2001
    Date of Patent: May 25, 2004
    Assignee: Seagate Technology LLC
    Inventors: Donald Everett Curtiss, Joseph Leigh, Frank Quan