Abstract: An illuminating system having a diffuser element (2) that is introduced into an illuminating beam path (1) and is arranged movably, in particular for oscillatory movement. Such system has applicability, for example, in microlithography projection exposure machines and associated wavefront measurement interferometers.

Abstract: A photomicroscope includes a port for a still camera (11) and an additional video camera (14). The video image of the video camera (14) serves both for the operation of a passive autofocusing system (23, 24) and for the determination of the exposure time for the still camera (11). The image areas that are used for exposure metering can be selected via a control panel (27). The integration time of the video camera (14) can be varied up to the range of minutes. The selected image areas are superimposed on the object image.

Abstract: The operating means for manual focusing of a microscope having a motorized-focus drive is embodied in a separate control console that is flexibly connected to and positionable alongside the microscope; the operating means includes a finger wheel or knob which is coupled with an electrical bit-signal generator (encoder). Digital output signals of the encoder are fed to control electronics for the focus-drive motor, and the electronic control system may either be contained within the control console, or it may be packaged, along with further electronic control means for additional functions, in a separate housing provided for the purpose.