Abstract: A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

Abstract: A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

Abstract: A metal phosphide composition is disclosed for generating a mixture of phosphine and diluent gas(es), presented ready for use in a hydrolysis process or apparatus in the form of a free-flowing particulate metal phosphide material composed of loose particles of said metal phosphide essentially free of metal phosphide dust, essentially free of hydrolysis retarding agents and essentially free of hydrophobic substances in the form of coatings or hydrophobizing additives. In use the hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, can be used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation.

Abstract: An apparatus and process feed at a controlled rate a free-flowing particulate material entrained in a carrier gas. The apparatus includes a gastight closed supply vessel for holding a supply of the particulate material and a riser tube inside the supply vessel, the bottom end of which is open near the bottom of the supply vessel and faces a venturi nozzle connected or adapted to be connected to a propellant gas supply. A bend at the top end of the riser tube leads by way of a duct outside the supply vessel. The riser tube includes an upwardly directed aperture at the beginning of the bend inside the supply vessel in axial alignment with the riser tube.