Patents by Inventor Fraser G. Morrison

Fraser G. Morrison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflecting optical element with eccentric optical passageway
    Patent number: 7760327
    Abstract: There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: July 20, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert, Bernhard Gellrich, Jens Kugler, Franz Sorg, Willi Heintel, Harald Kirchner, Wolfgang Keller, Andreas Frommeyer, Fraser G. Morrison