Patents by Inventor Fred Bouchard

Fred Bouchard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6077356
    Abstract: A liquid reagent dispensing assembly, comprising a gas-pressurizable vessel including a floor, and an interior volume bounded by interior wall and floor surfaces. A dip-tube liquid discharge conduit is employed for discharging liquid from the gas-pressurized vessel. The vessel is provided with a liquid level sensor for sensing liquid reagent level in the vessel interior volume. The floor of the vessel has a cavity therein extending downwardly from the surface of the floor, and the lower end of the dip tube is positioned in the cavity. The dispensing assembly of the invention may usefully be employed for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices, and achieves a high level of withdrawal of the reagent liquid from the vessel.
    Type: Grant
    Filed: December 17, 1997
    Date of Patent: June 20, 2000
    Assignee: Advanced Technology Materials, Inc.
    Inventor: Fred Bouchard