Patents by Inventor Frederick C. Zumsteg, Jr.

Frederick C. Zumsteg, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Copolymers for photoresists and processes therefor
    Patent number: 6872503
    Abstract: Fluoroolefin/acid group or protected acid group-containing copolymers for photoresist compositions and microlithography methods employing the photoresist compositions are described. These copolymer compositions comprise 1) at least one fluoroolefin, preferably hexafluoroisobutylene, and 2) an acid group or a protected acid group (e.g., a t-alkyl ester, preferably a t-butyl ester), which together impart high ultraviolet (UV) transparency and developability in basic media to these materials. The materials of this invention have high UV transparency, particularly at short wavelengths, e.g., 157 nm and 193 nm, which makes them useful for lithography at these short wavelengths.
    Type: Grant
    Filed: May 4, 2001
    Date of Patent: March 29, 2005
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Robert Clayton Wheland, Roger Harquail French, Frank Leonard Schadt, III, Frederick C. Zumsteg, Jr.
  • Nonlinear optical materials
    Patent number: 5312565
    Abstract: Novel organic glass compositions are disclosed which are poled to achieve nonlinear optical properties. Novel compounds useful for making said poled compositions are also disclosed; as are a method and a device for transforming electromagnetic radiation using a nonlinear optical element formed from said compositions; and certain intermediates for making novel compounds.
    Type: Grant
    Filed: May 8, 1991
    Date of Patent: May 17, 1994
    Assignee: E. I. duPont de Nemours and Company
    Inventors: Richard Beckerbauer, Dennis S. Donald, Wilson Tam, Frederick C. Zumsteg, Jr.