Patents by Inventor Frederick Fulgenico

Frederick Fulgenico has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for selective etching of a multi-layer substrate
    Patent number: 8613863
    Abstract: A method is disclosed for the selective etching of a multi-layer metal oxide stack comprising a platinum or tungsten layer on a TiN layer on an HfO2 or ZrO2 layer on a silicon substrate. In some embodiments, the method comprises a physical sputter process to selectively etch the platinum layer, followed by a first wet etch using a mixture of NH4OH and H2O2 to selectively etch the TiN layer, and a second wet etch using a dilute mixture of HF and HCl to selectively etch the HfO2 or ZrO2 layer.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: December 24, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Jinhong Tong, Frederick Fulgenico, ShouQian Shao