Patents by Inventor Frederik Goethals

Frederik Goethals has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sealed porous materials, methods for making them, and semiconductor devices comprising them
    Patent number: 8968864
    Abstract: A method for at least partially sealing a porous material is provided, comprising forming a sealing layer onto the porous material by applying a sealing compound comprising oligomers wherein the oligomers are formed by ageing a precursor solution comprising cyclic carbon bridged organosilica and/or bridged organosilanes. The method is especially designed for low k dielectric porous materials to be incorporated into semiconductor devices.
    Type: Grant
    Filed: September 18, 2012
    Date of Patent: March 3, 2015
    Assignees: IMEC, Universiteit Gent
    Inventors: Frederik Goethals, Pascal Van Der Voort, Isabel Van Driessche, Mikhail Baklanov