Patents by Inventor Fredrick D. Fishburn

Fredrick D. Fishburn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11626406
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: April 11, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Patent number: 11501804
    Abstract: A microelectronic device comprises a semiconductive pillar structure comprising a central portion, a first end portion, and a second end portion on a side of the central portion opposite the first end portion, the first end portion oriented at an angle with respect to the central portion and extending substantially parallel to the second end portion, a digit line contact on the central portion of the semiconductive pillar structure, a first storage node contact on the first end portion, and a second storage node contact on the second end portion. Related microelectronic devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: November 15, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Fredrick D. Fishburn, Si-Woo Lee, Scott L. Light, Song Guo
  • Publication number: 20220051699
    Abstract: A microelectronic device comprises semiconductive pillar structure comprising a central portion, a first end portion, and a second end portion on a side of the central portion opposite the first end portion, the first end portion oriented at an angle with respect to the central portion and extending substantially parallel to the second end portion, a digit line contact on the central portion of the semiconductive pillar structure, a first storage node contact on the first end portion, and a second storage node contact on the second end portion. Related microelectronic devices, electronic systems, and methods are also described.
    Type: Application
    Filed: August 13, 2020
    Publication date: February 17, 2022
    Inventors: Fredrick D. Fishburn, Si-Woo Lee, Scott L. Light, Song Guo
  • Publication number: 20210343719
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Application
    Filed: July 16, 2021
    Publication date: November 4, 2021
    Applicant: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Patent number: 11081487
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: August 3, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Patent number: 11004494
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: May 11, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10985239
    Abstract: Methods, apparatuses, and systems related to trim a semiconductor structure using oxygen are described. An example method includes forming a support structure for a semiconductor structure having a first silicate material on a working surface. The method further includes forming a first nitride material on the first silicate material. The method further includes forming a second silicate material on the first nitride material. The method further includes forming a second nitride material on the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing an electrode material within the opening. The method further includes removing portions of the support structure. The method further includes performing a controlled oxidative trim to an upper portion of the electrode material.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: April 20, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Matthew N. Rocklein, An-Jen B. Cheng, Fredrick D. Fishburn, Sevim Korkmaz, Paul A. Paduano
  • Publication number: 20210050409
    Abstract: Methods, apparatuses, and systems related to trim a semiconductor structure using oxygen are described. An example method includes forming a support structure for a semiconductor structure having a first silicate material on a working surface. The method further includes forming a first nitride material on the first silicate material. The method further includes forming a second silicate material on the first nitride material. The method further includes forming a second nitride material on the second silicate material. The method further includes forming an opening through the semiconductor structure. The method further includes depositing an electrode material within the opening. The method further includes removing portions of the support structure. The method further includes performing a controlled oxidative trim to an upper portion of the electrode material.
    Type: Application
    Filed: August 16, 2019
    Publication date: February 18, 2021
    Inventors: Matthew N. Rocklein, An-Jen B. Cheng, Fredrick D. Fishburn, Sevim Korkmaz, Paul A. Paduano
  • Patent number: 10833087
    Abstract: A semiconductor device comprises a memory storage component and a transistor in operable communication with the memory storage element. The transistor comprises a source region, a drain region, a gate electrode between the source region and the drain region, a charge trapping material surrounding at least an upper portion of the gate electrode, and an oxide material on sides of the charge trapping material. Related systems and methods are also disclosed.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: November 10, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Fredrick D. Fishburn, Haitao Liu, Soichi Sugiura, Oscar O. Enomoto, Mark A. Zaleski, Keisuke Hirofuji, Makoto Morino, Ichiro Abe, Yoshiyuki Nanjo, Atsuko Otsuka
  • Publication number: 20200295007
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Application
    Filed: May 29, 2020
    Publication date: September 17, 2020
    Applicant: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Patent number: 10707210
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Grant
    Filed: October 3, 2018
    Date of Patent: July 7, 2020
    Assignee: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Publication number: 20200066726
    Abstract: A semiconductor device comprises a memory storage component and a transistor in operable communication with the memory storage element. The transistor comprises a source region, a drain region, a gate electrode between the source region and the drain region, a charge trapping material surrounding at least an upper portion of the gate electrode, and an oxide material on sides of the charge trapping material. Related systems and methods are also disclosed.
    Type: Application
    Filed: August 21, 2018
    Publication date: February 27, 2020
    Inventors: Fredrick D. Fishburn, Haitao Liu, Soichi Sugiura, Oscar O. Enomoto, Mark A. Zaleski, Keisuke Hirofuji, Makoto Morino, Ichiro Abe, Yoshiyuki Nanjo, Atsuko Otsuka
  • Publication number: 20190181142
    Abstract: Some embodiments include an assembly having a stack of first and second alternating levels. The first levels are insulative levels. The second levels are device levels having integrated devices. Each of the integrated devices has a transistor coupled with an associated capacitor, and the capacitor is horizontally offset from the transistor. The transistors have semiconductor channel material, and have transistor gates along the semiconductor channel material. Each of the transistors has a first source/drain region along one side of the semiconductor channel material and coupled with the associated capacitor, and has a second source/drain region. Wordlines extend horizontally along the device levels and are coupled with the transistor gates. Digit lines extend vertically through the device levels and are coupled with the second source/drain regions. Some embodiments include methods of forming integrated structures.
    Type: Application
    Filed: October 3, 2018
    Publication date: June 13, 2019
    Applicant: Micron Technology, Inc.
    Inventor: Fredrick D. Fishburn
  • Publication number: 20190172517
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 6, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10242726
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: March 26, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10153027
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: December 11, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10083734
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: September 25, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 7501672
    Abstract: A method used to form a semiconductor device provides a silicide layer on a plurality of transistor word lines and on a plurality of conductive plugs. In one embodiment, the word lines, one or more sacrificial dielectric layers on the word lines, conductive plugs, and a conductive enhancement layer are formed through the use of a single mask. An in-process semiconductor device which may be formed using one embodiment of the inventive method is also described.
    Type: Grant
    Filed: October 10, 2006
    Date of Patent: March 10, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Fredrick D. Fishburn, Terrence B. McDaniel, Richard H. Lane
  • Patent number: 7119024
    Abstract: A method used to form a semiconductor device provides a silicide layer on a plurality of transistor word lines and on a plurality of conductive plugs. In one embodiment, the word lines, one or more sacrificial dielectric layers on the word lines, conductive plugs, and a conductive enhancement layer are formed through the use of a single mask. An in-process semiconductor device which can be formed using one embodiment of the inventive method is also described.
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: October 10, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Fredrick D. Fishburn, Terrence B. McDaniel, Richard H. Lane