Patents by Inventor Fredrik Sjöström

Fredrik Sjöström has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for overlay compensation between subsequently patterned layers on workpiece
    Patent number: 8137875
    Abstract: Methods and apparatuses for patterning workpieces are provided. The methods and apparatuses described herein improve overlay between subsequently patterned layers on a workpiece by introducing an improved alignment method that compensates for workpiece distortions.
    Type: Grant
    Filed: May 22, 2009
    Date of Patent: March 20, 2012
    Assignee: Micronic-Mydata AB
    Inventors: Fredrik Sjöström, Mikael Wahlsten
  • Methods and apparatuses for increasing available power in optical systems
    Publication number: 20100142022
    Abstract: A diffractive optical element (DOE) is included in an apparatus for combining a plurality of laser beams. The DOE combines the plurality of laser beams to generate a plurality of spatially distributed laser beams. The DOE is one of movable or stationary. The spatially distributed laser beams are usable to pattern a workpiece.
    Type: Application
    Filed: December 4, 2009
    Publication date: June 10, 2010
    Inventor: Fredrik Sjöström
  • Method and apparatus for overlay compensation between subsequently patterned layers on workpiece
    Publication number: 20090325088
    Abstract: Methods and apparatuses for patterning workpieces are provided. The methods and apparatuses described herein improve overlay between subsequently patterned layers on a workpiece by introducing an improved alignment method that compensates for workpiece distortions.
    Type: Application
    Filed: May 22, 2009
    Publication date: December 31, 2009
    Inventors: Fredrik Sjöström, Mikael Wahlsten