Abstract: This disclosure relates to a polishing composition that includes an abrasive, at least two pH adjusters, a barrier film removal rate enhancer, a low-k removal rate inhibitor, and an azole-containing corrosion inhibitor. This disclosure also features a method of using the polishing composition to polish a substrate containing copper and silicon oxide.

Abstract: A package structure is disclosed. The package structure includes a first substrate, a second substrate, a gap, and a directing structure. The second substrate is disposed under the first substrate. The gap is between the first substrate and the second substrate. The gap includes a first region and a second region. The first region is configured to accommodate a filling material. The directing structure is disposed in a flow path of the filling material and configured to reduce a migration of the filling material from the first region to the second region.

Abstract: An anti-fuse memory device includes an anti-fuse module, a reference current circuit and a controller. A write enable signal enables a write controller and a write buffer of the anti-fuse module to program a selected anti-fuse memory cell in an anti-fuse array of the anti-fuse module, and a timing controller of the anti-fuse module stops a program operation of the anti-fuse array after a sense amplifier of the anti-fuse module changes a state of a readout data signal for a predetermined time duration.

Abstract: Provided are a memory device and a method of manufacturing the same. The memory device includes: a stack structure; a first source/drain region and a second source/drain region located in a substrate beside the stack structure; a first self-aligned contact connected to the first source/drain region; a second self-aligned contact connected to the second source/drain region; a first liner structure located between the first self-aligned contact and a first sidewall of the stack structure; and a second liner structure located between the second self-aligned contact and a second sidewall of the stack structure. The first liner structure and the second liner structure are not connected and do not cover the stack structure.

Abstract: An embodiment interfacial bonding test structure may include a first substrate having a first planar surface, a second substrate having a second planar surface that is parallel to the first planar surface, a first semiconductor die, and a second semiconductor die, each semiconductor die bonded between the first substrate and the second substrate thereby forming a sandwich structure. The first semiconductor die and the second semiconductor die may be bonded to the first surface with a first adhesive and may be bonded to the second surface with a second adhesive. The first semiconductor die and the second semiconductor die may be displaced from one another by a first separation along a direction parallel to the first planar surface and the second planar surface. The second substrate may include a notch having an area that overlaps with an area of the first separation in a plan view.

Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes: a substrate having a device area and a peripheral area surrounding the device area; a via, disposed at the peripheral area and extending at least partially through the substrate; an insulating structure, disposed at the peripheral area, extending at least partially through the substrate and surrounding the via; and a doped region, disposed at the peripheral area, over or in the substrate and adjacent to the via.

Abstract: A memory array is provided. The memory array includes multiple memory blocks, each including multiple data storage regions and multiple groups of word lines. Each group of word lines extend across one of the memory blocks. The groups of word lines are connected to multiple overlying signal lines through multiple groups of first word line contact regions in the memory blocks and multiple second word line contact regions between the memory blocks.

Abstract: Disposed are a semiconductor structure, a manufacturing method thereof and a flash memory. The semiconductor structure includes a substrate, first isolation structures, a gate structure and an oxide layer. The first isolation structures define a first active area in a peripheral region of the substrate. The oxide layer is disposed on the substrate in the first active area and covered by the first isolation structures. The oxide layer and the first isolation structures define an opening exposing the substrate. The gate structure is disposed on the substrate in the first active area and includes a gate dielectric layer disposed in the opening and a gate disposed on the gate dielectric layer. The oxide layer is located around the gate dielectric layer. The width of the bottom surface of the gate is less than that of the top surface of the first active area.

Abstract: A method of forming a semiconductor structure includes forming first to third sacrificial layers on a substrate including a memory cell area and a peripheral area with a word line area. The second and third sacrificial layers in the word line area are removed to expose the top surface of the first sacrificial layer. The first sacrificial layer in the word line area and the third sacrificial layer in the memory cell area are removed. A word line dielectric layer and a first conductive layer are formed on the substrate in the word line area. The first and second sacrificial layers in the memory cell area are removed. A tunneling dielectric layer is formed on the substrate in the memory cell area. The thickness of the tunneling dielectric layer is smaller than the thickness of the word line dielectric layer.

Abstract: A grinding-type solar module recycling equipment having a platform, a grinding blade and a negative pressure collector. A solar module is placed on a solar module placement area of the platform and the grinding blade is controlled to touch and grind the solar module layer by layer. The powders ground from different layers of the solar module is separately and immediately recycled by the negative pressure suction head. Therefore, the powders do not fall around. The grinding-type solar module recycling equipment not only does not generate secondary pollutants, but also has high purity of powdered recycled materials, which is convenient for subsequent utilization.

Abstract: Disposed are a semiconductor structure, a manufacturing method thereof and a flash memory. The semiconductor structure includes a substrate, first isolation structures, a gate structure and an oxide layer. The first isolation structures define a first active area in a peripheral region of the substrate. The oxide layer is disposed on the substrate in the first active area and covered by the first isolation structures. The oxide layer and the first isolation structures define an opening exposing the substrate. The gate structure is disposed on the substrate in the first active area and includes a gate dielectric layer disposed in the opening and a gate disposed on the gate dielectric layer. The oxide layer is located around the gate dielectric layer. The width of the bottom surface of the gate is less than that of the top surface of the first active area.

Abstract: Provided are a memory device and a method of manufacturing the same. The memory device includes: a stack structure; a first source/drain region and a second source/drain region located in a substrate beside the stack structure; a first self-aligned contact connected to the first source/drain region; a second self-aligned contact connected to the second source/drain region; a first liner structure located between the first self-aligned contact and a first sidewall of the stack structure; and a second liner structure located between the second self-aligned contact and a second sidewall of the stack structure. The first liner structure and the second liner structure are not connected and do not cover the stack structure.

Abstract: Disposed are a semiconductor structure, a manufacturing method thereof and a flash memory. The semiconductor structure includes a substrate, first isolation structures, a gate structure and an oxide layer. The first isolation structures define a first active area in a peripheral region of the substrate. The oxide layer is disposed on the substrate in the first active area and covered by the first isolation structures. The oxide layer and the first isolation structures define an opening exposing the substrate. The gate structure is disposed on the substrate in the first active area and includes a gate dielectric layer disposed in the opening and a gate disposed on the gate dielectric layer. The oxide layer is located around the gate dielectric layer. The width of the bottom surface of the gate is less than that of the top surface of the first active area.

Abstract: A method for fabricating a semiconductor device includes: forming a first gate dielectric layer in a first and a second regions of a peripheral region of a substrate; forming a first conductive layer and a first hard mask layer over the substrate; forming a first mask layer on the first hard mask layer in the first region; removing the first hard mask layer outside the first region; removing the first hard mask layer; performing a wet etch process by taking the first hard mask layer as a mask, and removing the first conductive layer and the first gate dielectric layer outside the first region; removing the first hard mask layer and the first conductive layer; forming a second gate dielectric layer in the second region; and forming a first and a second gate conductive layers in the first and the second regions respectively.

Abstract: A binocular telescope includes a pair of Schmidt-Pechan roof prisms, a second half pentaprism, a right-angle prism, a main circuit board, and an auxiliary circuit board. The second half pentaprism is connected to a first lateral surface of one of the first half pentaprisms. A second lateral surface of the second half pentaprism substantially faces the other first half pentaprism. The third lateral surface of the right-angle prism is connected to the second lateral surface of the second half pentaprism. A normal of the fourth lateral surface of the right-angle prism is perpendicular to an imaginary plane. The imaginary plane includes a normal of the first lateral surface and a normal of the second lateral surface. The light emitter and the light receiver on the auxiliary circuit board are arranged above the fourth lateral surface of the right-angle prism and electrically connected with the main circuit board respectively.

Abstract: A method for fabricating a semiconductor device includes: forming a first gate dielectric layer in a first and a second regions of a peripheral region of a substrate; forming a first conductive layer and a first hard mask layer over the substrate; forming a first mask layer on the first hard mask layer in the first region; removing the first hard mask layer outside the first region; removing the first hard mask layer; performing a wet etch process by taking the first hard mask layer as a mask, and removing the first conductive layer and the first gate dielectric layer outside the first region; removing the first hard mask layer and the first conductive layer; forming a second gate dielectric layer in the second region; and forming a first and a second gate conductive layers in the first and the second regions respectively.

Abstract: A method of forming a semiconductor structure includes forming first to third sacrificial layers on a substrate including a memory cell area and a peripheral area with a word line area. The second and third sacrificial layers in the word line area are removed to expose the top surface of the first sacrificial layer. The first sacrificial layer in the word line area and the third sacrificial layer in the memory cell area are removed. A word line dielectric layer and a first conductive layer are formed on the substrate in the word line area. The first and second sacrificial layers in the memory cell area are removed. A tunneling dielectric layer is formed on the substrate in the memory cell area. The thickness of the tunneling dielectric layer is smaller than the thickness of the word line dielectric layer.

Abstract: A method for manufacturing a semiconductor device is provided. The method includes the following steps: forming a lining layer on a substrate and a plurality of gate structures; forming a first spacer layer on the lining layer; forming a stop layer on the first spacer layer; forming a first sacrificial layer on the stop layer and between the gate structures; removing a portion of the first sacrificial layer so that the top surface of the first sacrificial layer is located between the upper portions of the gate structures; forming a second spacer layer on the first sacrificial layer and the gate structures; and removing a portion of the second spacer layer so that the remaining second spacer layer is located between the upper portions of the gate structures.

Abstract: A method for manufacturing a memory device is provided. The method includes the following steps: providing a substrate; forming a plurality of first gate structures; forming a lining layer on the substrate; forming a spacer layer on the lining layer; forming a stop layer on the spacer layer; forming a first sacrificial layer on the stop layer; removing a portion of the first sacrificial layer to expose the stop layer on the first gate structures, and to expose the stop layer at the bottoms of the trenches; removing the stop layer at the bottoms of the trenches to expose the spacer layer; removing the remaining first sacrificial layer; forming a second sacrificial layer on the substrate; and removing the second sacrificial layer, and removing the spacer layer and the lining layer at the bottoms of the plurality of trenches to expose the substrate.

Abstract: Disposed are a semiconductor structure, a manufacturing method thereof and a flash memory. The semiconductor structure includes a substrate, first isolation structures, a gate structure and an oxide layer. The first isolation structures define a first active area in a peripheral region of the substrate. The oxide layer is disposed on the substrate in the first active area and covered by the first isolation structures. The oxide layer and the first isolation structures define an opening exposing the substrate. The gate structure is disposed on the substrate in the first active area and includes a gate dielectric layer disposed in the opening and a gate disposed on the gate dielectric layer. The oxide layer is located around the gate dielectric layer. The width of the bottom surface of the gate is less than that of the top surface of the first active area.